Wafer protective film and manufacturing method thereof
TW202635487APending Publication Date: 2026-09-01ADVANCED PAO TRUSVAL TECHNOLOGY CO LTD
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Patent Information
- Application Number
- TW114106140
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2025-02-19
- Publication Date
- 2026-09-01
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Abstract
The present invention provides a wafer protective film and manufacturing method thereof. The wafer protective film includes a base layer and an anti-static layer. The anti-static layer is composed of acrylic resin and includes a photosensitizer, a release agent, and an anti-static liquid. The weight percentages of the photosensitizer, release agent, and anti-static liquid are below
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