Storage container opening / closing device and storage container opening / closing method

Abstract

A storage container opening / closing device includes: a storage portion configured to house a frame member to which a pellicle film is attached; a cover configured to cover the storage portion; a storage container support unit configured to support the storage container; and an opening / closing unit configured to open and close the storage container by moving the cover, in which the opening / closing unit includes: a retainer configured to retain the cover; a first movement unit configured to move the cover retained by the retainer in a direction away from and toward the storage portion; and a second movement unit configured to tilt the cover retained by the retainer with respect to the storage portion.

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