Active gas generation apparatus

TW202635582APending Publication Date: 2026-09-01TMEIC CORP
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Patent Information

Application Number
TW114140498
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-11-15
Filing Date
2025-10-20
Publication Date
2026-09-01

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Abstract

An object of the present disclosure is to provide an active gas generation apparatus having an electrode unit stnicture capable of suppressing an insulation breakdown phenomenon in a region other than a discharge space. In an electrode unit
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