Method for coating glass substrate

Abstract

The disclosure is a method for coating a glass substrate, comprising the following steps: cleaning a glass substrate and performing a pre-treatment on a surface of the glass substrate through plasma. An intermediate layer is formed on the surface of the glass substrate through chemical vapor deposition or atomic layer deposition, and then the glass substrate is transported to a physical vapor deposition chamber for thin film deposition to form a titanium metal conductive layer on the surface of the intermediate layer. Through the coating method described in the disclosure, the adhesion between the titanium metal conductive layer and the glass substrate can be increased, and it is beneficial to improve the yield and reliability of subsequent packaging processes.

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