Slurry, grinding method and manufacturing method of parts

Abstract

A slurry containing abrasive particles and water, the abrasive particles comprising cerium oxide particles, the peak temperature of which, according to EGA-MS analysis of the cerium oxide particles at m / z=44, is below 385°C in the 200–500°C range. A grinding method comprising the step of grinding a workpiece using the slurry. A method for manufacturing a part comprising the step of obtaining a part using a workpiece ground by the grinding method.