Molybdenum liner deposition
TW202635922APending Publication Date: 2026-09-01LAM RES CORP
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Patent Information
- Application Number
- TW114142798
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-11-05
- Filing Date
- 2025-11-04
- Publication Date
- 2026-09-01
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Figure TWG2TA001074588_001 
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Abstract
Methods and systems for forming molybdenum liner layers in features involve etching during or after deposition of the liner layer. Integration processes include filling the features with conductive material after forming the liner layer. In some embodiments, the molybdenum liner layers are diffusion barriers.
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