Method and system of growing and using cesium lithium borate crystals

TW202635961APending Publication Date: 2026-09-01KLA CORP
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Patent Information

Application Number
TW114150396
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-12-09
Filing Date
2025-12-22
Publication Date
2026-09-01

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Abstract

A method and system for growing a cesium lithium borate (CsLiB6O10) crystal is provided. Lasers and characterization systems incorporating a cesium lithium borate crystal grown according to the method disclosed herein are also provided. The method includes growing a crystal from a melt that contains chloride (Cl-) ions. These crystals have lower defect density and contain fewer OH groups and / or less water than crystals grown by conventional techniques and so are suitable for use at high powers and short deep UV wavelengths. A frequency conversion apparatus and an optical system containing a frequency conversion apparatus are also provided.
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