Assembly method of sealing components, substrate processing device and sealing part

Abstract

This invention provides a sealing member for improving sealing performance, a substrate processing apparatus, and a method for assembling a sealing portion. The sealing member of this invention is used for a sealing portion of a substrate processing apparatus and includes: a sealing member body having an annular shape, and a visual confirmation portion disposed on the surface of the sealing member body and having a different color from the sealing member body; when the direction of the opening formed through the sealing member body is defined as axial, the visual confirmation portion is disposed on one side of the axial direction.

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