Closure system

Abstract

A closed system having a closing element (110) for closing a process chamber (12), a processing tool assembly (140) that can be inserted into the process chamber through an opening (122) of the closing element (110) for processing in the process chamber, for closing the opening (122) in the closing element (110) while passing through and inserted into the process chamber, and having a controller (170) for causing a joint movement of the processing tool assembly (140) and the closing element (110) when the process chamber (12) is closed and the processing tool assembly (140) partially passes through the opening (122) of the closing element (110), wherein the processing tool assembly (140) and the closing element (110) are coupled through a fluid bearing (1350). none

Images