Simultaneous multi-wavelength and multi-angle ellipsometry

Abstract

Angle resolved, multiple wavelength ellipsometry is performed using a light source that produces light having multiple wavelengths with each wavelength modulated with a different characteristic. The wavelengths are co-linearly incident on the sample over a range of angles of incidence. A single detector array receives the reflected light, with different pixels in the array that correspond to different angles of incidence to provide angle resolved measurements. The signals from each pixel are demodulated based on the modulation characteristics of the wavelengths to recover wavelength information for the different angles of incidence. The characteristics can include at least frequency, code, shape, or some combination thereof.

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