Concentration measuring device

Abstract

A concentration measuring device that accurately measures the concentration of hydrogen peroxide gas is provided. The concentration measuring device includes: a measurement cell provided with a transparent window; a first sensor configured to measure a temperature of a gas and generate a first electrical signal; a second sensor configured to measure a pressure of the gas and generate a second electrical signal; a first light-receiving element configured to convert an amount of light having a predetermined wavelength incident on the gas through the transparent window into a fourth electrical signal; a second light-receiving element configured to receive an amount of light transmitted through the gas through the transparent window and converts it into a fifth electrical signal; and a calculation unit calculates a concentration of the gas based on the first electrical signal, the second electrical signal, the fourth electrical signal, and the fifth electrical signal.

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