X-ray imaging system and method for operating an x-ray imaging system

TW202636104APending Publication Date: 2026-09-01CARL ZEISS SMT GMBH
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Patent Information

Application Number
TW114149987
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-01-10
Filing Date
2025-12-18
Publication Date
2026-09-01

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Abstract

This case discloses an X-ray imaging system (A#100) for imaging a sample (A#102), comprising: a sample stage (A#122) for supporting the sample (A#102); an X-ray source (A#112) for emitting X-rays toward a region of interest (A#104) of the sample (A#102); and an X-ray detector (A#138) for detecting X-rays (A#114") transmitted through the region of interest (A#104); wherein the sample stage (A#122) includes an opening (A#148) for the emitted X-rays (A#114, A#114') and / or the transmitted X-rays (A#114") to pass through. An x-ray imaging system (A#100) for imaging a sample (A#102), comprising a sample mount (A#122) for supporting the sample (A#102), an x​​-ray source (A#112) for emitting x-rays (A#114, A#114') towards a region of interest (A#104) of the sample (A#102), and an x​​-ray detector (A#138) for detecting x-rays (A#114") transmitted through the region of interest (A#104), wherein the sample mount (A#122) comprises an opening (A#148) for passing through of the emitted x-rays (A#114, A#114') and / or the transmitted x-rays (A#114").
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