X-ray inspection apparatus and x-ray inspection system

TW202636106APending Publication Date: 2026-09-01RIGAKU CORP
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Patent Information

Application Number
TW114148186
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-10-30
Filing Date
2025-12-09
Publication Date
2026-09-01

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Abstract

An X-ray inspection apparatus and an X-ray inspection system capable of observing a sample using a detector suitable for each application are provided in a single apparatus. An X-ray source for irradiating parallel X-rays with a plate-shaped sample, a sample stage for holding the sample, a plurality of detectors
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