X-ray inspection apparatus and x-ray inspection system
TW202636106APending Publication Date: 2026-09-01RIGAKU CORP
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Patent Information
- Application Number
- TW114148186
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-10-30
- Filing Date
- 2025-12-09
- Publication Date
- 2026-09-01
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Abstract
An X-ray inspection apparatus and an X-ray inspection system capable of observing a sample using a detector suitable for each application are provided in a single apparatus. An X-ray source for irradiating parallel X-rays with a plate-shaped sample, a sample stage for holding the sample, a plurality of detectors
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