Method of operating test apparatus
TW202636129APending Publication Date: 2026-09-01TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
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Patent Information
- Application Number
- TW114114132
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-02-25
- Filing Date
- 2025-04-15
- Publication Date
- 2026-09-01
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Abstract
A test apparatus may be operated by attaching a contact interface substrate including probe contact pads to a bottom of a probe card, and disposing a probe support assembly over the probe card. The probe support assembly includes a piezoelectric device array containing a plurality of piezoelectric unit devices. Each of the piezoelectric unit devices includes a respective piezoelectric sensor. An array of probe needles may be attached to the probe contact pads.
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