Manufacturing method

Abstract

This invention provides a method for manufacturing an optical device, enabling the assembly of smaller optical devices with higher precision in a shorter time. A first holding member that holds and displaces a first optical device on a first holding surface, and a second holding member that holds and displaces a second optical device on a second holding surface, are disposed on a vibration damping table for damping a gantry. A detection member detects the oscillation of the vibration damping table based on its displacement. A first imaging member, positioned to capture images of the first and second holding surfaces, captures an image of either the first or second holding surface when the detected oscillation is less than a predetermined threshold. The position of the first holding surface is calculated based on the first image. Referring to the calculated position of the first holding surface, the first optical device is placed on the first holding surface using a first mounting member. The position of the second holding surface of the second holding member is calculated based on the first image. Referring to the calculated position of the second holding surface, the second optical device is placed on the second holding surface using a second mounting member.

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