Pellicle film attachment device and pellicle film attachment method

TW202636213APending Publication Date: 2026-09-01LINTEC CORP
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Patent Information

Application Number
TW114149839
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-01-23
Filing Date
2025-12-18
Publication Date
2026-09-01

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Abstract

A pellicle film attachment device, which is configured to attach a pellicle film to an adherend surface of a frame member, includes an attachment unit configured to attach the pellicle film to the adherend surface to which a liquid adheres; and a dryer configured to dry the pellicle film attached to the adherend surface.
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