MEMS mirror array module

TW202636219APending Publication Date: 2026-09-01CARL ZEISS SMT GMBH
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
TW114145602
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-11-22
Filing Date
2025-11-21
Publication Date
2026-09-01

Smart Images

  • Figure TWG2TA001074732_001
    Figure TWG2TA001074732_001
  • Figure TWG2TA001074732_002
    Figure TWG2TA001074732_002
  • Figure TWG2TA001074732_003
    Figure TWG2TA001074732_003
Patent Text Reader

Abstract

that is sufficient to prevent an undesirably high temperature increase in or on the MEMS mirror array structure
Need to check novelty before this filing date? Find Prior Art