Illumination system for a mask inspection system

TW202636225APending Publication Date: 2026-09-01CARL ZEISS SMT GMBH
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Patent Information

Application Number
TW115101688
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-01-30
Filing Date
2026-01-15
Publication Date
2026-09-01

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Abstract

is guided via an illumination light sub-channel which varies within an illumination overall channel (3G) on account of the displaceable optics unit
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