Methods and mechanisms for using machine learning to generate diagnostic data for a particle event

Abstract

A system configured to obtain, by a processor, a set of manufacturing data associated with a particle event that occurred during a manufacturing process performed by a substrate processing system. A respective subset of data from the set of manufacturing data is provided as input to each machine learning model of a plurality of machine learning models. A respective output is obtained from each of the machine learning models. Each output is indicative of diagnostic data associated with the particle event. A diagnostic report is generated based on the output data.

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