Information processing methods, computer programs and information processing devices

Abstract

This invention provides an information processing method, computer program, and information processing apparatus, which are expected to detect defects in a plurality of inspection objects that are regularly arranged on a substrate based on image data obtained by photographing a substrate. In the information processing method of this embodiment, the information processing apparatus acquires image data obtained by photographing a plurality of inspection objects arranged on a substrate, detects the plurality of inspection objects from the acquired image data, determines the regularity of the arrangement of the plurality of inspection objects based on the acquired image data, and detects defects in the substrate based on the detection results of the plurality of inspection objects and the determination results of the regularity of the arrangement of the plurality of inspection objects.

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