Radio frequency feed device and semiconductor processing equipment

Abstract

The present invention discloses a radio frequency feed device and semiconductor processing equipment, relating to the fields of photovoltaics and semiconductors. The radio frequency feed device is used to feed radio frequency power to a carrier boat, wherein the carrier boat comprises alternately stacked radio frequency electrode plates and ground electrode plates. The radio frequency feed device includes an radio frequency power distribution component, multiple radio frequency feed components, and a grounding component. The radio frequency power distribution component is used to distribute radio frequency power to the multiple radio frequency feed components. Each radio frequency feed component has an radio frequency input terminal and an radio frequency output terminal; the radio frequency input terminal is used to receive an radio frequency signal corresponding to the radio frequency power, and the radio frequency output terminal is used to connect to at least one of the radio frequency electrode plates. The grounding component is used to connect to the ground electrode plates. The present invention can solve problems such as the inability to ensure consistency of radio frequency power between electrode plate layers.

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