A device for increasing the radiation power density of an electrothermal-radiative assembly

Abstract

The present invention relates to a device for increasing the radiation power density of an electrothermal conversion radiation assembly as a photothermal radiation heating source in a semiconductor manufacturing process. The device utilizes a columnar radiation structure to maintain the original high photothermal radiation transmittance intrinsic characteristic on the surface of a highly smooth photothermal radiation transmission unit of an electrothermal conversion radiation element on the opposite side of one or more sets of electrothermal conversion photothermal radiation elements. In addition, a thin film-like object with high photothermal radiation reflectivity is covered on the surface of the photothermal radiation transmission unit to concentrate the photothermal radiation of the electrothermal conversion radiation assembly and project it onto the surface of a heated object at a distance from the opposite side of the support, thereby facilitating the energy utilization efficiency of heating the heated object and expanding the application scope of the heating function.

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