Apparatus for generating pulsed laser radiation and method for generating pulsed laser radiation

TW202636564APending Publication Date: 2026-09-01TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE
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Patent Information

Application Number
TW115103207
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-01-31
Filing Date
2026-01-27
Publication Date
2026-09-01

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Abstract

The present invention relates to an apparatus (1) for generating pulsed laser radiation (11), comprising a laser radiation source (16) designed as a semiconductor laser and a circuit configuration (18) for providing a pulsed control current to the laser radiation source (16), characterized in that the circuit configuration (18) provides the pulsed control current to the laser radiation source (16) such that the control current has at least one control current pulse, wherein the circuit configuration is also configured to provide the pulsed control current in such a way that the pulsed control current increases with a first slope starting from a first value below a preset threshold current intensity, and after reaching the preset threshold current intensity, the pulsed control current first increases with a second slope greater than the first slope, and then the slope of the control current decreases until it reaches a maximum value, and after reaching the maximum value, the pulsed control current decreases with a third slope until it falls below the threshold current intensity.
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