Vertical cavity surface laser and manufacturing method thereof

Abstract

The present application relates to a vertical cavity surface laser and a manufacturing method thereof, belonging to the field of semiconductor technology. The vertical cavity surface laser is provided with at least one light-emitting hole area. The manufacturing method comprises: providing a substrate, the substrate comprising an oxidation limitation groove, a first area existing between a positive projection of the oxidation limitation groove on the substrate and a positive projection of the light-emitting hole area on the substrate; forming a passivation layer on a side of the substrate where the oxidation limitation groove is provided; based on a preset mask plate, etching the passivation layer to form a through hole, the preset mask plate having a first opening, the first opening being located in the first area; and at least forming a first electrode in the through hole, a positive projection of the first electrode on the substrate does not overlap with the positive projection of the light-emitting hole area on the substrate.

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