Capacitor structure and semiconductor device including the capacitor structure

Abstract

An example capacitor structure includes a lower electrode structure, a dielectric pattern and an upper electrode. The lower electrode structure includes a first lower electrode on a substrate, and a second lower electrode on a sidewall of the first lower electrode. The second lower electrode includes an alloy of a first metal and a second metal. The dielectric pattern is disposed on a surface of the lower electrode structure. The upper electrode is disposed on a surface of the dielectric pattern. The second lower electrode has a thickness varying in a vertical direction perpendicular to an upper surface of the substrate. A weight ratio between the first metal and the second metal is uniform in the vertical direction in the second lower electrode.

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