Substrate holder and method for fixing and bonding a substrate
TW202636852APending Publication Date: 2026-09-01EV GRP E THALLNER GMBH
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Patent Information
- Application Number
- TW115118904
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2020-06-29
- Filing Date
- 2021-06-08
- Publication Date
- 2026-09-01
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Abstract
The present invention relates to a substrate holder (1, 1', 1'', 1''', 1'''', 1'''') for mounting a substrate (13) and a corresponding method thereof, the substrate holder (1, 1', 1'', 1''', 1'''', 1'''') including fixing elements (6, 6', 6'') for fixing the substrate (13), wherein the fixing elements (6, 6', 6'') can be divided into regions (7, 7'). The invention relates to a substrate holder (1,1',1'',1''',1'''',1''''') for mounting a substrate (13), comprising fixing elements (6,6',6'') for fixing the substrate (13), wherein the fixing elements (6,6',6'') can be grouped into zones (7, 7'), and a corresponding method.
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