Cassette hold down with contact arms

Abstract

A cassette hold down includes a frame and a plurality of contact arms that extend from the frame. The contact arms include a first contact arm and a second contact arm that extend in different directions from the frame. Each of the contact arms includes a fixed end affixed to the frame, a free end opposite to the fixed end, a cassette contact that extends from the free end in a first vertical direction, and a cassette contact that extends from the free end in a second vertical direction. A wafer container includes a pod, a door configured to close an open end of the pod, a wafer cassette, and a cassette hold down. In the assembled wafer container, a cassette contact of each contact arm of the frame abuts the wafer cassette in the wafer container.

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