Integrated System and Maintenance Methods

Abstract

The integrated system of the present invention includes a substrate processing system, a maintenance device, and at least one control circuit. The substrate processing system includes a vacuum transfer module and a plurality of process modules. The vacuum transfer module includes a vacuum transfer chamber. Each of the plurality of process modules includes a processing chamber connected to the vacuum transfer chamber. The maintenance device has a transfer robot configured to be detachably connected to the vacuum transfer chamber for maintaining the substrate processing system. At least one control circuit is configured to control the maintenance device to use the transfer robot to move a magnetically levitated mobile device between the vacuum transfer chamber and the maintenance device.

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