Integrated System and Maintenance Methods

Abstract

The integrated system of this invention includes a plurality of substrate processing systems, a maintenance device, and an overall control circuit. Each of the plurality of substrate processing systems includes a vacuum transfer module, a plurality of process modules, and control circuitry. The maintenance device is detachably connected to each of the plurality of substrate processing systems. The overall control circuitry controls the plurality of substrate processing systems and the maintenance device. The overall control circuitry issues a command to connect the maintenance device to one of the plurality of substrate processing systems. After the maintenance device is connected to a substrate processing system, the control circuitry of that substrate processing system issues a command to control the maintenance device.

Images