Rim vented susceptor
TW202636910APending Publication Date: 2026-09-01APPLIED MATERIALS INC
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Patent Information
- Application Number
- TW114142319
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-10-31
- Filing Date
- 2025-10-31
- Publication Date
- 2026-09-01
Smart Images
Figure TWG2TA001074556_001 
Figure TWG2TA001074556_002 
Figure TWG2TA001074556_003
Abstract
A susceptor defining an axial direction, a radial direction, and a circumferential direction is provided. The susceptor includes a support surface for a substrate. The susceptor further includes a rim extending around a periphery of the support surface. The rim defines a plurality of pockets spaced apart from one another along the circumferential direction. The rim further defines one or more vents at each respective pocket of the plurality of pockets.
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