Tray apparatus for transferring substrate

Abstract

A tray apparatus for transferring a substrate is provided, comprising: a fixed tray comprising a plate-shaped fixed frame having a shape corresponding to the substrate, and configured to seat the substrate while supporting a bottom surface of the substrate in a state of being spaced apart by a predetermined height from the fixed frame; and an inner tray comprising a plate-shaped inner frame corresponding to the substrate, the inner tray being coupled in a state of being stacked on the fixed frame so as to be in a state of being spaced apart from the substrate, the inner frame being brought into close contact with the bottom surface of the substrate while being lifted by a substrate carrier so as to separate the substrate from the fixed tray, and the inner tray being transferred together with the substrate by the substrate carrier.

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