A storage system for storing a plurality of substrate holders, substrate handling platform and reactor assembly

TW202636915APending Publication Date: 2026-09-01LPE SPA
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Patent Information

Application Number
TW115101931
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-01-22
Filing Date
2026-01-19
Publication Date
2026-09-01

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    Figure TWG2TA001075163_003
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Abstract

The shelves are pivotally connected to the pin around the rotation axis and are configured to rotate around said rotation axis independently from each other. Each removable housing is adapted to support at least one substrate holder suitable for supporting a substrate
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