Conveyor system, jig substrate, and measurement method

TW202636922APending Publication Date: 2026-09-01TOKYO ELECTRON LTD
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Patent Information

Application Number
TW114150694
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-01-06
Filing Date
2025-12-23
Publication Date
2026-09-01

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Abstract

An exemplary embodiment of the present invention provides a conveying system comprising a first support portion, a second support portion, a ring member, a fixture substrate, and a camera unit. The first support portion has a first peripheral portion. The second support portion is annular and surrounds the first support portion. The ring member is mounted on the second support portion. The fixture substrate has a second peripheral portion. The fixture substrate transmits light in its thickness direction. The fixture substrate has a reference mark formed to a known size. With the fixture substrate mounted on the first support portion, the camera unit captures images of the first peripheral portion, the reference mark, the second peripheral portion, and the ring member within the same field of view.
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