Object support and method of manufacturing an object support

TW202636926APending Publication Date: 2026-09-01ASML NETHERLANDS BV
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Patent Information

Application Number
TW115100370
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-01-07
Filing Date
2026-01-06
Publication Date
2026-09-01

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Abstract

An object support comprising a main body that comprises a multi-phase material comprising grains of a harder material in a matrix of a softer material and a plurality of burls projecting from the main body to define a support plane for supporting an object; wherein the burls include mini-burls that consist essentially of a single grain of the harder material.
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