Semiconductor testing equipment

Abstract

A tester according to the present invention comprises: a test carrier unit on which a probe card is mounted; a plurality of substrate units electrically connected to the probe card via the test carrier unit; a plurality of power supply units supplying power to the plurality of substrate units; and a body unit on which the test carrier unit is mounted, and having a first receiving portion for receiving the plurality of substrate units and a second receiving portion for receiving the plurality of power supply units; the plurality of power supply units being detachably mounted to the second receiving portion; and the body unit having a busbar 60 electrically connected to the plurality of power supply units in a loading / unloading direction (Y-axis direction) of the plurality of power supply units relative to the second receiving portion. none

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