Semiconductor testing equipment and inspection system
TW202636935APending Publication Date: 2026-09-01NIHON MICRONICS KK
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Patent Information
- Application Number
- TW114147902
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-12-26
- Filing Date
- 2025-12-08
- Publication Date
- 2026-09-01
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Abstract
The base unit includes: a base plate; a float plate that is abutted by the base unit connector portion and is movable relative to the base plate in the mounting direction of the base plate connector portion of the base unit connector portion; and a coil spring that is elastically deformable and is mounted between the base plate and the float plate in the mounting direction. none
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