Presumed model making apparatus, presumed model making method and recording medium

Abstract

The present invention addresses the problem of providing a technique for more easily creating and updating models for estimating the characteristic values ​​of a substrate shape. The coating and developing apparatus 2 includes a processed image acquisition unit 102 and a substrate image acquisition unit 101. The coating and developing apparatus 2 includes a grayscale value estimation model creation unit 111. The coating and developing apparatus 2 includes a reference value calculation unit 107 for calculating reference values ​​used to update the grayscale value estimation model. The coating and developing apparatus 2 includes a CD estimation model creation unit 112 for creating a CD estimation model. The grayscale value estimation model creation unit 111 determines whether the grayscale value estimation model should be updated based on the newly acquired substrate image from the substrate image acquisition unit 101 and the reference value calculated by the reference value calculation unit 107. When it is determined that an update is necessary, the grayscale value estimation model creation unit 111 updates the grayscale value estimation model using the newly acquired substrate image.

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