substrate heating device

Abstract

[Problem] A substrate heating device in which both a cooling plate and a heating plate are disposed within a common frame, so that the temperature of the substrate is uniform in its surface. [Solution] A substrate heating device that heats a substrate within a frame, wherein a heating plate for holding and heating the substrate and a cooling plate for holding and cooling the substrate are disposed side by side within the frame; a cover, which is liftable and disposed above the heating plate, covers the heating plate; and a partition member, which separates the substrate transport space between the heating plate and the cooling plate, is disposed on the cover.

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