Filter element cleaning apparatus

Abstract

A filter element cleaning apparatus includes a cleaning solution input unit, a main pipe, multiple filter tanks, and a cleaning solution output unit. The main pipe is connected to the cleaning solution input unit and includes multiple connecting ports. Every filter tank includes a cover and a filter cup. The cover is disposed on an end of the filter cup. The cover has an inlet and an outlet. The inlet and the outlet respectively communicate with the filter cup. Every inlet of the filter tanks is respectively connected to the connecting port. There is a connecting length between the inlet and the connecting port. The connecting length between the inlet of each filter element and the main pipe is the same. The cleaning solution output unit is connected to the outlet of each filter tank.

Description

Technical Field

[0001] This case relates to cleaning devices, and in particular to a filter element cleaning device. Prior Technology

[0002] Filtration is a process of removing impurities from a fluid. It can filter solid particles larger than the micropores of a filter element, or it can remove specific substances from the fluid through ion exchange or adsorption. Filtration devices are widely used in various precision industries, such as the production and manufacturing of semiconductor components, to ensure the cleanliness of the chemicals used in the process, thereby improving process yield.

[0003] Filter cartridges are the main components in filtration devices. In the demanding semiconductor manufacturing processes, the basic conditions of each filter cartridge must be strictly controlled to ensure process stability and guarantee that the filtration capacity of each cartridge meets the required quality. Therefore, filter cartridges in filtration devices must be cleaned by a filter cartridge cleaning device before leaving the factory. However, in the past, pre-shipment cleaning of filter cartridges involved sequentially supplying cleaning fluid to each cartridge through a cleaning fluid inlet unit. However, when the cleaning fluid passes through multiple filter cartridges sequentially, the time taken for the cleaning fluid to pass through each cartridge is not the same after the cleaning process, resulting in inconsistent cleanliness levels among the individual cartridges.

[0004] For mature semiconductor processes (such as those above 28 nanometers), slight inconsistencies in filter cleanliness are usually not a major concern, as their contribution to process defects is negligible. However, with the advancement of semiconductor processes (such as those below 16 nanometers), the tolerance for fluctuations in process conditions within the same process step becomes increasingly lower. This means that inconsistencies in filter cleanliness before shipment can lead to process condition fluctuations sufficient to cause defects. When process engineers are considering various root causes of challenging process defects, they may find it difficult to rule out filter cleanliness, necessitating additional experimental time and costs for verification during the design of corresponding experiments. Summary of the Invention

[0005] This application provides a filter cartridge cleaning device, comprising a cleaning fluid input unit, a main pipe, a plurality of filter cartridge tanks, and a cleaning fluid output unit. The main pipe is connected to the cleaning fluid input unit and has a plurality of interfaces. Each filter cartridge tank includes a cover and a filter cup. The cover is disposed at one end of the filter cup and has an inlet and an outlet, which communicate with the inside of the filter cup. The inlet of each filter cartridge is connected to its respective interface, and there is a connection length between each inlet and each interface. The connection length between the inlet of each filter cartridge tank and the main pipe is the same. The cleaning fluid output unit is connected to the outlet of each filter cartridge tank.

[0006] In this way, when the cleaning fluid input unit inputs the cleaning fluid into the filter cartridge tank through the main pipe, the cleaning fluid can enter each filter cartridge tank simultaneously without any time difference, ensuring that the cleaning time of each cleaning fluid in each filter cartridge tank is consistent, and ensuring the cleaning effect of each filter cartridge.

[0007] In some embodiments, the aforementioned main pipe extends along the length direction and has a circumferential surface, with each interface located at the same length direction position on the circumferential surface.

[0008] In some embodiments, the aforementioned main tube has a circular cross-section, and the filter element grooves are arranged in a ring around the outer periphery of the main tube.

[0009] In some embodiments, the filter cleaning device further includes a first support member and a second support member, one end of the main pipe in the length direction is fixed to the first support member, the second support member is sleeved on the main pipe, and the second support member is positioned closer to the other end of the main pipe in the length direction than the first support member, and each filter element groove is detachably disposed on the second support member.

[0010] In some embodiments, the aforementioned second support member is a circular plate, with the main pipe passing through the center of the second support member, and each filter element groove located on the circumference of the second support member.

[0011] In some embodiments, the filter cleaning device further includes a tapping unit connected between the cleaning fluid output unit and the outlet of each filter cartridge.

[0012] In some embodiments, the aforementioned tapping unit includes a piping assembly and a control valve. The piping assembly includes at least one connecting pipe and is connected between the outlet of each filter cartridge and the control valve.

[0013] In some embodiments, the aforementioned piping assembly includes a first section, a second section, and a plurality of third sections connected to each other. The first section is connected to a control valve, the second section is connected to the first section and surrounds the main pipe, and the third sections are respectively connected to the outlets of the second section and each filter cartridge.

[0014] In some embodiments, the filter element cleaning device further includes a first support member and a second support member, with the main pipe fixed to the first support member, the second support member sleeved on the main pipe, and each filter element groove detachably disposed on the second support member, the aforementioned second section being parallel to the first support member and the second support member.

[0015] In some embodiments, the aforementioned second section is located within the area surrounded by each filter element groove.

[0016] In some embodiments, the filter element cleaning device further includes functional units, each filter element tank includes a functional interface, and the number of tap units is multiple, with one tap unit connecting the functional unit to the functional interface.

[0017] In some embodiments, the filter cleaning device further includes a first support and a second support. The main pipe extends along its length and is fixed to the first support. The second support is sleeved on the main pipe. Each filter element slot is detachably disposed on the second support. The aforementioned tapping unit includes a pipeline assembly and a control valve. The pipeline assembly includes a first section, a second section, and a plurality of third sections connected to each other. The first section is connected to the control valve. The second section is connected to the first section and surrounds the main pipe. The third sections are respectively connected to the second section. The second section is parallel to the first support and the second support. The second section is located within the area surrounded by each filter element slot, and the second section of the pipeline assembly of each tapping unit is located at different positions along its length. Simple Explanation of the Diagram

[0018] Figure 1 is a perspective view of one embodiment of the filter cleaning device of this application. Figure 2 is a top view schematic diagram of one embodiment of the filter cleaning device of this application. Figure 3 is a bottom view schematic diagram of one embodiment of the filter element cleaning device of this application. Figure 4 is a simplified diagram showing the configuration of the main pipe and filter tank in one embodiment of the filter cleaning device of this application. Figure 5 is a perspective view of one embodiment of the filter cleaning device of this application that further includes two functional units. Figure 6 is a perspective view of one embodiment of the filter cleaning device of this application that further includes four functional units. Figure 7 is a plan view of the embodiment shown in Figure 6. Figure 8 is a second planar schematic diagram of the embodiment shown in Figure 6. Figure 9 is a cross-sectional view drawn based on the 9-9 section line in Figure 8. Figure 10 is a cross-sectional view drawn based on the 10-10 section line in Figure 8. Implementation

[0019] Before this application is described in detail in its various embodiments, please note that the drawings in the following description are for illustrative purposes only and may not be drawn to scale, and not all details may be shown in the drawings.

[0020] In the description of this application, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "plural" means two or more.

[0021] This application provides a filter element cleaning device suitable for cleaning the filter element tank 30. The filter element tank 30 is an element capable of purifying various fluids, such as, but not limited to, various liquids or chemicals used in pharmaceuticals, food processing, semiconductor packaging, microelectronics processing, or the manufacture of various electronic devices.

[0022] Referring to Figures 1 to 3, Figure 1 is a perspective view of one embodiment of the filter element cleaning device of this application; Figure 2 is a top view of one embodiment of the filter element cleaning device of this application; and Figure 3 is a bottom view of one embodiment of the filter element cleaning device of this application. The filter element cleaning device includes a cleaning fluid input unit 10, a main pipe 20, a plurality of filter element tanks 30, and a cleaning fluid output unit 40. During the cleaning process, the filter elements are individually placed in the filter element tanks 30. The main pipe 20 is connected to the cleaning fluid input unit 10 and has a plurality of interfaces 22. Each filter element tank 30 includes a filter cup 31 and a cover 32. The cover 32 is disposed at one end of the filter cup 31 and has an inlet 321 and an outlet 322. The inlet 321 and the outlet 322 communicate with the filter cup 31. The inlet 321 of each filter element tank 30 is connected to each interface 22, and there is a connection length L between each inlet 321 and each interface 22. The connection length L between the inlet 321 and the main pipe 20 of each filter element tank 30 is the same. The cleaning fluid output unit 40 is connected to the outlet 322 of each filter element tank 30.

[0023] In this way, the cleaning fluid input unit 10 inputs cleaning fluid into the filter element tank 30 through the main pipe 20 and the inlet 321 of the filter element tank 30. The cleaning fluid passes through the inside of the filter element tank 30 to clean the filter element located therein, and finally outputs it to the cleaning fluid output unit 40 through the outlet 322. Based on the above, since the connection length L between each filter element tank 30 and the main pipe 20 is the same, the cleaning fluid can enter each filter element tank 30 simultaneously without time difference, ensuring that the cleaning time of the cleaning fluid is consistent for each filter element, ensuring that each filter element has the same cleaning effect, and further ensuring that each filter element has the same cleanliness before leaving the factory.

[0024] In some embodiments, the cleaning fluid input unit 10 provides cleaning fluid for cleaning the filter element, and the cleaning fluid output unit 40 recovers the cleaning fluid output from the filter element tank 30. In some embodiments, the cleaning fluid input unit 10 and the cleaning fluid output unit 40 may be, but are not limited to, storage containers or a combination of a storage container and a pump.

[0025] The main pipe 20 collects the cleaning fluid provided by the cleaning fluid input unit 10 and then delivers it to each filter cartridge tank 30. In some embodiments, the main pipe 20 is an elongated tube extending along the length direction D1. It is worth noting that the interface 22 of the main pipe 20 can be located at different positions on the main pipe 20 depending on whether the overall filter cartridge cleaning device is used vertically or horizontally.

[0026] Referring to Figures 1 and 4, Figure 4 is a simplified diagram of the configuration of the main pipe and filter cartridges in one embodiment of the filter cartridge cleaning device of this application. In some embodiments, the filter cartridge cleaning device is used vertically, that is, when the filter cartridge cleaning device is in use, the main pipe 20 is placed vertically on a field plane or facility along the vertical length direction D1 as shown in Figure 1. In some embodiments, the main pipe 20 is a circular long tube with a circular cross-section. The main pipe 20 has a circumferential surface 21, and each interface 22 is arranged on the circumferential surface 21 along the cross-sectional shape of the main pipe 20. In the embodiment shown in Figure 1, each interface 22 of the main pipe 20 is arranged in a ring around the length direction D1. In addition, each interface 22 on the main pipe 20 is located at the same position along the length direction D1 on the circumferential surface 21. In this way, each filter cartridge 30 is connected to each interface 22 of the main pipe 20 in the same orientation. Since each interface 22 on the main pipe 20 is arranged in a ring around the length direction D1, each filter cartridge 30 is arranged in a ring around the interface 22 of the main pipe 20 corresponding to the position of each interface 22.

[0027] Specifically, looking at the overall end face of the filter cleaning device (as shown in the simplified diagrams of Figures 2 and 4), the arrangement outlines of each interface 22 (in Figure 4, the lines connecting the centers of the interfaces 22 to the same basic positions) are concentric circles relative to the outer outline of the main pipe 20. Similarly, the arrangement outlines of each filter element groove 30 (in Figure 4, the lines connecting the centers of the filter element groove 30 to the same basic positions) are also concentric circles relative to the arrangement outlines of each interface 22. Furthermore, the diameter of the arrangement outline of each filter element groove 30 is larger than the diameter of the arrangement outline of each interface 22, and the diameter of the arrangement outline of each interface 22 is larger than the diameter of the main pipe 20. Therefore, when each filter element groove 30 is connected to each interface 22 of the main pipe 20, each filter element groove 30 is connected to the nearest interface 22 on the main pipe 20 via its inlet 321, and the connection length L between the inlet 321 of each filter element groove 30 and the nearest interface 22 is the same. In this way, when the cleaning fluid is output from each port 22 of the main pipe 20 to the inlet 321 of the filter element tank 30, the cleaning fluid can be output from each port 22 simultaneously and enter each filter element tank 30 simultaneously. In this way, under the same cleaning fluid output time, the time for the cleaning fluid to flow through each filter element tank 30 can be kept consistent, ensuring that each filter element is cleaned under the same conditions.

[0028] Referring to Figures 1 to 4, in some embodiments where the filter cleaning device is used vertically, the filter cleaning device further includes a first support member 51 and a second support member 52. The first support member 51 supports the main pipe 20, and the second support member 52 is fitted onto the main pipe 20 and supports each filter element groove 30. In some embodiments, the first support member 51 has a flat plate structure, and one end of the main pipe 20 in the length direction D1 is fixed to the first support member 51. The second support member 52 is then fitted onto the main pipe 20 near the other end. In these embodiments, each filter element groove 30 is detachably disposed on the second support member 52.

[0029] Referring to Figures 1 to 4, in some embodiments of the filter cleaning device that include a first support member 51 and a second support member 52, the length of the main pipe 20 in the length direction D1 is greater than the length of each filter element groove 30 in the length direction D1, and the distance between the first support member 51 and the second support member 52 in the length direction D1 is greater than the length of each filter element groove 30 in the length direction D1. In these embodiments, when each filter element groove 30 is disposed on the second support member 52, the cover 32 of each filter element groove 30 abuts against one side of the second support member 52, and the filter cup 31 is located on the other side of the second support member 52 and is suspended between the first support member 51 and the second support member 52.

[0030] Referring to Figures 1 to 4, in some embodiments of the filter element cleaning device that include a first support member 51 and a second support member 52, the second support member 52 is a circular plate shape, with the main pipe 20 passing through the center of the second support member 52, and the filter element grooves 30 arranged in a ring around the circumference of the second support member 52. In these embodiments, the filter element cleaning device may further include a drive source, which is powered by the second support member 52. The drive source drives the second support member 52 to rotate, thereby enabling automatic filter element replacement in conjunction with an automatic control system.

[0031] Referring to Figures 1 to 4, in some embodiments, the filter element cleaning device further includes a tap unit 60 for connecting the cleaning fluid input unit 10, the cleaning fluid output unit 40, or other functional units F to the main pipe 20 or the filter element tank 30. In some embodiments, the functional unit F may be, but is not limited to, a working fluid input unit, a working fluid output unit, or other functional units F that can be connected to the filter element tank 30. In these embodiments, the cover 32 of the filter element tank 30 further includes a functional interface 323, through which the functional unit F can be connected to the functional interface 323 of the filter element tank 30 via the tap unit 60.

[0032] Referring to Figures 1 to 4, in some embodiments, the number of tap units 60 is multiple. In some embodiments, tap unit 60 includes a first tap unit 60A and a second tap unit 60B. The cleaning fluid input unit 10 is connected to the main pipe 20 through the first tap unit 60A, and the cleaning fluid output unit 40 is connected to the outlet 322 of each filter element tank 30 through the second tap unit 60B. In these embodiments, each tap unit 60 includes a pipeline assembly 61 and a control valve 62. The pipeline assembly 61 is connected between the filter element tank 30 and the control valve 62, and the control valve 62 is connected to the functional unit F.

[0033] Referring to Figures 1 to 4, in some embodiments of the filter cleaning device that include a first support member 51 and a second support member 52, control valves 62 connecting the first tap unit 60A and the second tap unit 60B of the cleaning fluid input unit 10 and the cleaning fluid output unit 40 are disposed on the first support member 51. Each control valve 62 is then connected to the main pipe 20 or the filter cartridge tank 30 through the pipeline assembly 61.

[0034] Referring to Figures 1 to 4, in some embodiments of the filter cleaning device that include functional units F, the piping assembly 61 of the tap unit 60 may vary depending on the configuration position or number of each functional unit F. In some embodiments, the piping assembly 61 includes at least one connecting pipe, which may be, but is not limited to, a straight pipe, various types of bends, or tee pipes (Y-shaped / T-shaped). The piping assembly 61 may be one of the aforementioned connecting pipe types or a combination of the aforementioned connecting pipe types.

[0035] Referring to Figures 1 to 4, in some embodiments where the cleaning fluid input unit 10 is connected to the main pipe 20 through the first tap unit 60A, the piping assembly 61 of the first tap unit 60A includes a plurality of connecting pipes, the control valve 62 is disposed on the first support member 51, the cleaning fluid input unit 10 is connected to the control valve 62, and the control valve 62 connects the piping assembly 61 to the main pipe 20 near the first support member 51 through the connection of the plurality of connecting pipes.

[0036] Referring to Figures 1 to 4, in some embodiments where the cleaning fluid output unit 40 is connected to the filter cartridge 30 via the second tap unit 60B, the piping assembly 61 of the second tap unit 60B includes a plurality of connecting pipes connecting the cleaning fluid output unit 40 and the outlets 322 of each filter cartridge 30, and each connecting pipe is connected to form a first section P1, a second section P2 and a plurality of third sections P3. The first section P1 is connected to the control valve 62, the second section P2 is connected to the first section P1 and surrounds the main pipe 20, and the third sections P3 are respectively connected to the second section P2 and the outlets 322 or functional interfaces 323 of each filter cartridge 30.

[0037] Referring to Figures 1 to 4, in some embodiments, the number of filter element slots 30 is six. In these embodiments, the second segment P2 of the second tapping unit 60B is configured as a hexagon to surround the main pipe 20, but this invention is not limited to this. In other embodiments, when the overall volume of the filter element cleaning device or the applicable field space is not limited, the number of filter element slots 30 can be changed as needed. In addition, the shape of the second segment P2 of the tapping unit 60 is not limited to a polygon, and the shape of the second segment P2 surrounding the main pipe 20 can also be circular, elliptical, or irregular.

[0038] Referring to Figures 1 to 4, in some embodiments, the second section P2 of the piping assembly 61 is located within the area surrounded by each filter element groove 30 and is parallel to the first support 51 and the second support 52. This concentrates the piping assembly 61 within the area surrounded by each filter element groove 30, preventing the piping assembly 61 from being dispersed outside each filter element groove 30 and reducing the overall space required for the filter cleaning device.

[0039] Furthermore, referring to Figures 5 to 10, Figure 5 is a perspective view of one embodiment of the filter element cleaning device of this application that further includes two functional units F. Figure 6 is a perspective view of one embodiment of the filter element cleaning device of this application that further includes four functional units F. Figure 7 is a plan view of the embodiment of Figure 6. Figure 8 is a plan view of the embodiment of Figure 6. Figure 9 is a cross-sectional view drawn according to section line 9-9 in Figure 8. Figure 10 is a cross-sectional view drawn according to section line 10-10 in Figure 8. When the filter element cleaning device includes a plurality of functional units F, the second section P2 of the pipeline assembly 61 of each branch unit 60 surrounds the main pipe 20, and the second section P2 of the pipeline assembly 61 of each branch unit 60 is located at different length directions D1. In this way, the second section P2 of each branch unit 60 can be placed within the area surrounded by each filter element tank 30 without occupying additional space around the filter element cleaning device.

[0040] Referring to Figure 5, in some embodiments, the filter element cleaning device includes two functional units F. In these embodiments, the tapping unit 60 further includes a third tapping unit 60C and a fourth tapping unit 60D. The second section P2 of the pipeline assembly 61 of each tapping unit 60 surrounds the outer periphery of the main pipe 20, and the second section P2 of the pipeline assembly 61 of each tapping unit 60 is located at different length directions D1. In this way, the second section P2 of each tapping unit 60 can be placed within the range surrounded by each filter element tank 30, and more functional units F can be provided for configuration, improving the overall flexibility of use of the filter element cleaning device.

[0041] Referring to Figures 6 to 10, in some embodiments, the filter element cleaning device includes four functional units F. In these embodiments, the tapping unit 60 further includes a fifth tapping unit 60E and a sixth tapping unit 60F. The second section P2 of the pipeline assembly 61 of each tapping unit 60 surrounds the outer periphery of the main pipe 20, and the second section P2 of the pipeline assembly 61 of each tapping unit 60 is located at different positions in the length direction D1. In addition, the second section P2 of each tapping unit 60 can be placed within the area surrounded by each filter element tank 30, and a greater number of functional units F can be provided for configuration, improving the overall flexibility of use of the filter element cleaning device.

[0042] 10: Cleaning fluid input unit 20: Supervisor 21: Circumference 22: Interface 30: Filter cartridge compartment 31: Filter cup 32: Cover 321: Entrance 322: Export 323: Functional Interface 40: Cleaning fluid output unit 51: First support component 52: Second support component 60: Tap unit 61: Piping components 62: Control valves 60A: First tap unit 60B: Second Tap Unit 60C: Third Tap Unit 60D: Fourth Tap Unit 60E: Fifth Tap Unit 60F: Sixth Tap Unit L: Connection length D1: Length direction P1: First Section P2: Second Section P3: Third Section F: Functional Unit

Claims

1. A filter element cleaning device, comprising: One cleaning fluid input unit; A main pipe is connected to the cleaning fluid input unit and has multiple interfaces; multiple filter cartridges, each including a cover and a filter cup, the cover being disposed at one end of the filter cup and having an inlet and an outlet, the inlet and the outlet communicating into the filter cup, the inlet of each filter cartridge being connected to each interface, each inlet having a connection length to each interface, and the connection length between the inlet of each filter cartridge and the main pipe being the same; and a cleaning fluid output unit is connected to the outlet of each filter cartridge.

2. The filter cleaning device as claimed in claim 1, wherein the main pipe extends along a length direction and has a circumferential surface, and the interfaces are located on the circumferential surface at the same position along the length direction.

3. The filter cleaning device as claimed in claim 2, wherein the main pipe has a circular cross-section and the filter grooves are arranged in a ring around the outer periphery of the main pipe.

4. The filter cleaning device as described in claim 2 further includes a first support member and a second support member, one end of the main tube in the length direction is fixed to the first support member, the second support member is sleeved on the main tube, and the second support member is positioned in the length direction closer to the other end of the main tube than the first support member, and each filter groove is detachably disposed on the second support member.

5. The filter element cleaning device as described in claim 4, wherein the second support member is in the form of a circular plate, the main pipe is inserted at the center of the second support member, and each of the filter element grooves is located at the circumference of the second support member.

6. The filter cartridge cleaning apparatus as described in claim 1 further includes a tap unit connected between the cleaning fluid output unit and the outlet of each of the filter cartridge tanks.

7. The filter cleaning device as claimed in claim 6, wherein the tapping unit includes a piping assembly and a control valve, the piping assembly including at least one connecting pipe and connected between the outlet of each filter cartridge and the control valve.

8. The filter cleaning device as claimed in claim 7, wherein the piping assembly includes a first section, a second section and a plurality of third sections connected to each other, the first section being connected to the control valve, the second section being connected to the first section and surrounding the main pipe, and the third sections being connected to the second section and the outlet of each of the filter cartridges respectively.

9. The filter element cleaning device as described in claim 8 further includes a first support member and a second support member, the main pipe being fixed to the first support member, the second support member being sleeved on the main pipe, each of the filter element grooves being detachably disposed on the second support member, and the second section being parallel to the first support member and the second support member.

10. The filter cleaning apparatus as claimed in claim 8, wherein the second section is located within the area surrounded by each of the filter cartridge slots.

11. The filter element cleaning device as described in claim 6 further includes a functional unit, each of the filter element tanks includes a functional interface, the number of the tapping units is multiple, and one of the tapping units is connected between the functional unit and the functional interface.

12. The filter cleaning device as claimed in claim 11 further includes a first support member and a second support member, the main pipe extending along a length direction and fixed to the first support member, the second support member being sleeved on the main pipe, each filter element groove being detachably disposed on the second support member, the tapping unit including a pipeline assembly and a control valve, the pipeline assembly including a first section, a second section and a plurality of third sections connected to each other, the first section being connected to the control valve, the second section being connected to the first section and surrounding the main pipe, the third sections being respectively connected to the second section, the second section being parallel to the first support member and the second support member, the second section being located within the area surrounded by each filter element groove, and the second section of the pipeline assembly of each tapping unit being located at different positions along the length direction.

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