A system and method for treating air containing volatile organic compounds

TW202637261APending Publication Date: 2026-09-16TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
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Patent Information

Application Number
TW114116731
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-10
Filing Date
2025-05-05
Publication Date
2026-09-16

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Abstract

A system and method for treating air containing volatile organic compounds (VOCs). The system includes a concentrator, a thermal incinerator, and a catalytic filtration system. The concentrator removes the VOCs from the air to form treated air and concentrated VOC air. The concentrated VOC air is mixed with fuel to form a fuel / air mixture that is combusted by the thermal incinerator to form incinerator exhaust air, which is cooled to form cooled incinerator exhaust air. In the catalytic filtration system, ozone and / or reactive oxygen species (ROS) are generated and injected into the cooled incinerator exhaust air. Particulate matter is removed from the cooled incinerator exhaust air by one or more filters. Using one or more catalysts, NOx in the cooled incinerator exhaust air containing the ozone and / or ROS is converted into nitrogen oxides of the formula NxOy, where x and y are each
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