A system and method for treating air containing volatile organic compounds
TW202637261APending Publication Date: 2026-09-16TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
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Patent Information
- Application Number
- TW114116731
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-03-10
- Filing Date
- 2025-05-05
- Publication Date
- 2026-09-16
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Abstract
A system and method for treating air containing volatile organic compounds (VOCs). The system includes a concentrator, a thermal incinerator, and a catalytic filtration system. The concentrator removes the VOCs from the air to form treated air and concentrated VOC air. The concentrated VOC air is mixed with fuel to form a fuel / air mixture that is combusted by the thermal incinerator to form incinerator exhaust air, which is cooled to form cooled incinerator exhaust air. In the catalytic filtration system, ozone and / or reactive oxygen species (ROS) are generated and injected into the cooled incinerator exhaust air. Particulate matter is removed from the cooled incinerator exhaust air by one or more filters. Using one or more catalysts, NOx in the cooled incinerator exhaust air containing the ozone and / or ROS is converted into nitrogen oxides of the formula NxOy, where x and y are each
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