Modular equipment for treating gaseous pollutants

Abstract

A modular device for treating gaseous pollutants includes a frame, a pump assembly, a reactor assembly, an electronics and control assembly, a second fluid delivery assembly, and a housing. The frame includes a first region, a second region adjacent to the first region, and a third region adjacent to the first region, each region having an installation opening communicating with the outside. The reactor assembly is detachably connected to the pump assembly. The electronics and control assembly is detachably connected to the reactor assembly. The device is configured to allow the pump assembly, the reactor assembly, and the electronics and control assembly to be installed laterally into the first region, the second region, and the third region, respectively, via the installation openings.

Description

Technical Field

[0001] This invention relates to a device for treating gaseous pollutants, and more particularly to a modular device for treating gaseous pollutants. Prior Technology

[0002] In manufacturing, electronic, and chemical engineering processes, such as semiconductor, display, solar panel, and thin film production, gaseous pollutants containing various chemicals harmful to humans or the environment are generated. Therefore, equipment for treating gaseous pollutants is required. Common types include combustion, plasma, water washing, and catalytic types, such as the equipment disclosed in U.S. Patent Publications Nos. US5769626A, US11512688B2, US11519401B2, US11530694B2, and US20240310041A1.

[0003] For example, combustion and water washing equipment for treating gaseous pollutants, which is frequently used in semiconductor manufacturing processes, requires the installation of reactors, scrubbing towers, gas supply components, fluid supply components, water tanks, electronic control devices, etc., along with pipeline connections and housing assembly. This involves a large amount of mechanical assembly, fluid pipeline connections, and electronic circuits. The structure is complex and difficult to assemble, requiring a lot of manpower and time costs. Moreover, with the trend of increasingly compact design, the density of hardware inside the housing is getting higher and higher, which further increases the difficulty of assembly. Summary of the Invention

[0004] The main objective of this invention is to solve the problem that conventional equipment for treating gaseous pollutants is difficult to assemble.

[0005] To address the aforementioned problems, this invention discloses a modular device for treating gaseous pollutants, comprising a frame, a pump assembly, a reactor assembly, an electronic and control assembly, a fluid delivery assembly, and a housing. The frame includes multiple interconnected connectors and multiple spaces defined by these connectors. These spaces include a first region, a second region adjacent to the first region, and a third region adjacent to the first region. Each region has an installation opening leading to the outside. The pump assembly is disposed in the first region. The reactor assembly includes an exhaust gas guiding device, a first-stage reactor, a second-stage reactor, and a water tank. The exhaust gas guiding device is detachably connected to the first-stage reactor to guide exhaust gas into it. The water tank is connected downstream of the first-stage reactor, and the second-stage reactor is connected to the water tank to receive the exhaust gas passing through it. The reactor assembly is detachably connected to the pump assembly and is disposed in the second region. The electronic and control assembly is detachably connected to the reactor assembly and is disposed in the third region. The fluid delivery assembly is detachably connected to the reactor assembly. The fluid delivery assembly includes multiple pipes configured to supply cooling water to the reactor assembly, discharge cooling water from the reactor assembly, supply fresh water to the first-stage reactor and / or the second-stage reactor, and supply circulating water to the water tank. A housing is disposed on the frame to seal the spaces. The housing includes multiple cover plates detachably attached to the connector to expose or seal the mounting opening. Each cover plate includes an exhaust gas inlet, an exhaust gas outlet, and a gas inlet. The exhaust gas inlet is connected to an exhaust gas guide device, the exhaust gas outlet is connected to a downstream portion of the second-stage reactor, and the gas inlet is connected to the fluid delivery assembly. The frame extends along a first transverse direction, a second transverse direction, and a longitudinal direction to define the boundary of the equipment with the housing. The device is configured to allow the pump assembly, the reactor assembly, and the electronics and control assembly to be installed laterally into the first region, the second region, and the third region, respectively, through the mounting opening when the cover is removed. Simple Explanation of the Diagram

[0006] Figure 1 is a three-dimensional schematic diagram of an embodiment of the present invention. Figure 2 is a three-dimensional schematic diagram of removing the shell in one embodiment of the present invention. Figure 3 is an exploded view of the frame and shell in one embodiment of the present invention. Figures 4A and 4B are three-dimensional schematic diagrams of the frame according to an embodiment of the present invention. Figures 5A and 5B are top and side views of Figure 4B, respectively. Figures 6A to 6H are assembly diagrams of an embodiment of the present invention. Figure 7 is a three-dimensional schematic diagram of another embodiment of the present invention. Figures 8A and 8B are perspective views of removing the casing in another embodiment of the present invention. Figures 9A and 9B are three-dimensional schematic diagrams of the frame according to another embodiment of the present invention. Implementation

[0007] Throughout this document, the terminology used in the description of various embodiments is for the purpose of describing particular examples only and is not intended to be limiting. Unless the context explicitly indicates otherwise, or is not intentionally limiting the number of elements, the singular forms “a,” “an,” and “the” used herein also include the plural forms. On the other hand, the terms “comprising” and “including” are intended to be included, meaning that additional elements may be present in addition to those listed; when an element is described as “connected” or “coupled” to another element, the element may be directly connected or coupled to the other element or through an intermediate element; when an element describing a layer, region, or substrate is referred to as being “on” another element, it means that it may be directly on the other element or that an intermediate element may be present between them, whereas when elements are referred to as being “directly on another element,” there is no intermediate element between them; furthermore, the order in which the embodiments are described should not be construed as implying that operations or steps must adhere to the literal order, and alternative embodiments may perform steps, operations, methods, etc., in an order different from the order described herein.

[0008] One aspect of this invention discloses an apparatus for treating gaseous pollutants, applied to the treatment of effluent streams, such as waste gas, from processes involving semiconductors, display panels, and solar panels. Figures 1 and 2 show an example of such an apparatus, using a combustion and water-washing type waste gas treatment device. Further, this waste gas treatment device can employ a plasma flame or a flame generated by fuel as the combustion technology. For example, pollutants such as silane, arsine, and phosphine produced by chemical vapor deposition (CVD) processes are suitable for combustion and water-washing type waste gas treatment devices. This invention is not limited thereto; the apparatus for treating gaseous pollutants can also be a combustion type waste gas treatment device, a wet waste gas treatment device, a plasma type waste gas treatment device, a plasma vaporization waste gas treatment device, or any combination thereof. For example, plasma-type exhaust gas treatment equipment is suitable for perfluorinated compound (PFC) gases (such as CF4) or other pollutants such as SF6, NF3, and N2O.

[0009] Gaseous pollutant treatment equipment typically includes hardware such as gas pipelines, reactors, scrubbing towers, water tanks, pumps, pipelines for transporting fluids (such as fuel, air, water, etc.), valves, gas panels, detectors, and electronic control systems. This hardware is assembled into a housing to form a point-of-use aeration system. Due to customer requirements for space utilization efficiency and maximizing production capacity, the size of gaseous pollutant treatment equipment is trending towards compactness, which also increases the difficulty of assembly. Installing and connecting all the aforementioned hardware within the housing requires considerable manpower and time. The gaseous pollutant treatment equipment disclosed in this invention adopts a modular structural design, facilitating assembly and significantly reducing assembly time and manpower requirements.

[0010] Figure 1 shows an apparatus for treating gaseous pollutants, including a housing 10 and multiple modules. The housing 10 includes a frame 101 and a shell 102. The shell 102 includes multiple plates and is detachably mounted to the frame 101. Figure 2 shows the apparatus for treating gaseous pollutants after removing the shell 102. The modules include a pump assembly 20, one or more microwave sources 30, a reactor assembly 40, an electronic and control assembly 50, a gas supply system 60, a first fluid delivery assembly 70, and a second fluid delivery assembly 80. This example is a plasma-type exhaust gas treatment apparatus, therefore including the microwave source 30; other examples of the present invention are not limited to this.

[0011] Figure 3 shows an exploded view of the frame 101 and the housing 102. The housing 102 includes multiple cover plates, including a right cover plate 1021, a left cover plate 1022, a top cover plate 1023, a front cover plate 1024, a rear cover plate 1025, and a bottom cover plate 1026. This example uses the front cover plate 1024 as an operating area and the top cover plate 1023 as a gas inlet / outlet area. The front cover plate 1024 includes a right side portion 1024a and a left side portion 1024b. The front cover plate 1024 may also be provided with one or more physical buttons and an operating interface, such as a combination of a display screen and an input interface, or a display screen with an input interface, such as a touch screen. The top cover plate 1023 is provided with an exhaust gas inlet 1023a, an exhaust gas outlet 1023b, and a gas inlet 1023c. In one example, the cover plate is also provided with a drain section that is connected to the pump assembly 20.

[0012] Figure 4A shows the structural configuration of the frame 101, which includes multiple connectors, which can be rods. These connectors are assembled to form a bottom structure 101a, a top structure 101b, and an intermediate structure 101c. The bottom structure 101a includes a bottom outer frame 101a-1 and one or more bottom crossbars 101a-2. The top structure 101b includes a top outer frame 101b-1 and is selectively... The frame 101 includes one or more top crossbars. The intermediate structure 101c includes an intermediate outer frame 101c-1, which is composed of a plurality of straight bars. These straight bars are installed between the bottom outer frame 101a-1 and the top outer frame 101b-1. The frame 101 may also include one or more crossbars connected to the intermediate outer frame 101c-1, thereby defining a plurality of areas located within the housing 10 and openings for these areas to communicate with the outside.

[0013] Referring to Figure 4B, the box 10 defines multiple spaces 110, including a first bottom space 1101, a second bottom space 1102, a third space 1103, a fourth space 1104, and a top space 1105. These spaces are cubes of different sizes and are adjacent to each other, forming a compact configuration. Furthermore, the third space 1103 and the fourth space 1104 are respectively located above the first bottom space 1101 and the second bottom space 1102 and are adjacent to each other in the longitudinal direction (Z-axis direction). The third space 1103 is adjacent to the fourth space 1104 in the transverse direction (X-axis direction). The top space 1105 is located above the fourth space 1104 and is adjacent to each other in the longitudinal direction (Z-axis direction), and the top space 1105 is adjacent to the third space 1103 in the transverse direction (X-axis direction). The right side portion 1024a of the front cover 1024 corresponds to the first bottom space 1101 and the third space 1103, and the left side portion 1024b corresponds to the second bottom space 1102, the fourth space 1104 and the top space 1105.

[0014] In this example, the frame 101 adopts a cubic configuration, thus having a top surface 10a, a bottom surface 10b, a front side surface 10c, a rear side surface 10d, a left side surface 10e, and a right side surface 10f, as shown in Figures 5A and 5B. The frame 101 has a first length L1, a second length L2, and a third length L3. Referring also to Figure 4A, the crossbars of the frame 101 include a first crossbar 101d-1, a second crossbar 101d-2, a third crossbar 101d-3, a fourth crossbar 101d-4, a fifth crossbar 101d-5, and a sixth crossbar 101d-6. The first crossbar 101d-1 and the second crossbar 101d-2 are located below the front side surface 10c and the rear side surface 10d, respectively. The third crossbar 101d-1... 01d-3 and the fourth crossbar 101d-4 are disposed above the front side 10c and the rear side 10d. The fifth crossbar 101d-5 is mounted on the first crossbar 101d-1 and the second crossbar 101d-2, located between the left side 10e and the right side 10f, and close to the right side 10f. The sixth crossbar 101d-6 is located on the left side 10e and mounted on the middle outer frame 101c-1.

[0015] The lengths of the first bottom space 1101, the second bottom space 1102, the third space 1103, the fourth space 1104, and the top space 1105 on the Y-axis extend from the front side 10c to the rear side 10d, approximately equal to the second length L2. The lengths of the first bottom space 1101, the second bottom space 1102, the third space 1103, and the fourth space 1104 on the X-axis extend from the right side 10f and the left side 10e, respectively, to between 30% and 70% of the first length L1. The percentage can vary depending on the design; for example, it could be between 20% and 80%, and in this example, it's approximately between 45% and 55%. The lengths of the first bottom space 1101 and the second bottom space 1102 on the X-axis can be complementary, as can the lengths of the third space 1103 and the fourth space 1104 on the X-axis. For example, the lengths of the first bottom space 1101 and the second bottom space 1102 could be 45% and 55% of the first length L1, respectively. Alternatively, they could be independent, for example, each being 40%. On the other hand, the lengths of the first bottom space 1101 and the third space 1103 on the X-axis can be the same or different, and the lengths of the second bottom space 1102 and the fourth space 1104 on the X-axis can be the same or different.

[0016] The lengths of the first bottom space 1101 and the second bottom space 1102 on the Z-axis start from the bottom surface 10b and extend to between 10% and 30% of the third length L3. This length may vary depending on the design, for example, it may be between 5% and 50%, and in this example, it is approximately between 10% and 15%. The lengths of the first bottom space 1101 and the second bottom space 1102 on the Z-axis may be the same or different. The lengths of the third space 1103 and the fourth space 1104 on the Z-axis start from the top of the first bottom space 1101 and the second bottom space 1102, respectively. The length of the third space 1103 on the Z-axis extends to the top surface 10a, and the length of the fourth space 1104 on the Z-axis terminates between 50% and 90% of the third length L3. This length may vary depending on the design, for example, it may be between 40% and 95%, and in this example, it is approximately between 75% and 85%.

[0017] The length of the top space 1105 on the X-axis starts from the left side 10e and extends to between 30% and 70% of the first length L1. This length may vary depending on the design, for example, it may be between 20% and 80%, and in this example, it is approximately between 45% and 55%. The lengths of the top space 1105 and the third space 1103 on the X-axis can be complementary or independent. The length of the top space 1105 on the Z-axis starts from the top of the fourth space 1104 and extends to the top surface 10a.

[0018] The frame 101 also defines a plurality of openings that communicate with the areas, including a first front opening 1010, a second front opening 1011, a third front opening 1012, a first right opening 1013, a second right opening 1014, a first left opening 1015, a second left opening 1016, a first rear opening 1017, a second rear opening 1018, and a third rear opening 1019.

[0019] Returning to Figure 2, in the spatial configuration of the modules of the gaseous pollutant treatment equipment, the main components occupying the volume are the pump assembly 20, the microwave source 30, the reactor assembly 40, the electronic and control assembly 50, and the gas supply system 60. In this invention, these modules adopt a modular design, particularly the pump assembly 20, the microwave source 30, the reactor assembly 40, the electronic and control assembly 50, and the gas supply system 60. The pump assembly 20 is located in the first bottom space 1101, the microwave source 30 in the second bottom space 1102, the reactor assembly 40 in the third space 1103, the electronic and control assembly 50 in the fourth space 1104, and the gas supply system 60 in the top space 1105. This spatial arrangement of the areas and the relative positions of the modules achieve a more compact structural configuration. Simultaneously, the openings facilitate assembly by personnel or robotic arms, significantly reducing assembly time and manpower requirements.

[0020] The connections between these modules involve fluid and electrical connections. The pump assembly 20, the microwave source 30, the reactor assembly 40, and the gas supply system 60 are electrically connected to the electronic and control assembly 50 so as to be controlled by the electronic and control assembly 50. The reactor assembly 40 includes an exhaust gas guiding device 41, a first-stage reactor 42, a second-stage reactor 43, and a water tank 44. The first-stage reactor 42 and the second-stage reactor 43 are detachably mounted on the water tank 44. The exhaust gas guiding device 41 is connected to an exhaust gas source of a process and is detachably connected above the first-stage reactor 42. The exhaust gas guiding device 41 is used to guide exhaust gas from a semiconductor process device from top to bottom into the first-stage reactor 42. The water tank 44 is connected downstream of the first-stage reactor 42. The exhaust gas flows from the first-stage reactor 42 from top to bottom into the water tank 44, and then from the water tank 44 from bottom to top into the second-stage reactor 43, and finally exits from an exhaust port of the second-stage reactor 43.

[0021] The first-stage reactor 42 and the second-stage reactor 43 independently comprise one or more interconnected reaction modules. These reaction modules may be, but are not limited to, a combustion reactor, a wet reactor, a plasma combustion reactor, a plasma gasification reactor, and / or a thermal reactor. In this example, the first-stage reactor 42 is a combustion reactor, which may be a plasma combustion reactor or a plasma gasification reactor, and the second-stage reactor 43 is a packed scrubbing tower.

[0022] In this example of a gaseous pollutant treatment device, the required gases include inert gases (such as nitrogen) and compressed air (CDA), and the required liquids include fresh water and cooling water. The inert gas can be used for opening and closing fluid valves, differential pressure detection, and / or internal gas purging. The compressed air can be used in the plasma reactor; for example, compressed air ionized and used to impinge on the exhaust gas to further decompose it and / or provide airflow. A vortex airflow is formed on the inner wall of the pipe to prevent overheating and damage to the inner wall. In some embodiments, the compressed air can be replaced by an inert gas. The gas is connected to the reactor assembly 40 and / or fluid valves via the gas supply system 60 and piping. Fresh water is used for the water curtain of the reactor (the first-stage reactor 42 and / or the second-stage reactor 43) and / or the water tank 44, and cooling water is used for cooling the reactor assembly 40.

[0023] The pump assembly 20 is connected to the water tank 44 of the reactor assembly 40 via one or more pipes and can be electrically connected to the electronic and control assembly 50. The pump assembly 20 is used for the circulation and / or discharge of water in the water tank 44. The microwave source 30 is connected to one or more plasma modules of the first-stage reactor 42. In this example, there are two sets of microwave sources 30 and two sets of plasma modules, which can be connected via waveguides or cables. The electronic and control assembly 50 is electrically connected to an external control interface and one or more of the modules and their cooperating components, such as the pump assembly 20, the microwave source 30, the valves and detectors of the reactor assembly 40, the gas supply system 60, the first fluid delivery assembly 70, and the valves and detectors of the second fluid delivery assembly 80.

[0024] Figures 6A to 6H show the assembly process diagram for this example. During assembly, the housing 102 is removed from the frame 101, meaning the housing 102 is not installed on the frame 101, as shown in Figure 6A; alternatively, the housing 102 may be partially connected to the frame 101, but one or more openings may be exposed. The gaseous pollutant treatment device is assembled in a modular manner, meaning that the pump assembly 20, microwave source 30, reactor assembly 40, electronic and control assembly 50, and gas supply system 60 are provided separately; in other words, the pump assembly 20, microwave source 30, reactor assembly 40, electronic and control assembly 50, and gas supply system 60 are independent modules without any physical connection before being placed into the frame 101. In this example, the bottom cover plate 1026 is first installed on the bottom surface 10b of the frame 101 and is installed on or fixed to the bottom outer frame 101a-1.

[0025] Referring to Figures 6A and 6B, the pump assembly 20 is laterally inserted into the first bottom space 1101 through the first right side opening 1013 (operation O1). The pump assembly 20 can be placed or fixed to the bottom cover plate 1026 or the bottom outer frame 101a-1. The pump assembly 20 can be inserted into the first bottom space 1101 through the first right side opening 1013 along the negative X direction, through the first front opening 1010 along the negative Y direction, or through the first rear opening 1017 along the positive Y direction, or it can be inserted into the first bottom space 1101 through the first left side opening 1015 along the positive X direction.

[0026] The microwave source 30 is inserted laterally into the second bottom space 1102 from the first left-side opening 1015 (operation O2). In this example, the microwave source 30 includes a first microwave source 31 and a second microwave source 32, which are stacked on top of each other. The first microwave source 31 can be placed or fixed to the bottom cover plate 1026 or the bottom outer frame 101a-1, and the second microwave source 32 is placed or fixed above the first microwave source 31. The first microwave source 31 and the second microwave source 32 can be supported by a shelf. The shelf can be first installed or fixed to the frame 101 and / or the housing 102, or the first microwave source 31 and the second microwave source 32 can be first installed or fixed to the shelf, and then installed or fixed to the frame 101 and / or the housing 102. The microwave source 30 can be placed into the second bottom space 1102 via the first left side opening 1015 along the negative X direction, the first front side opening 1010 along the negative Y direction, or the first rear side opening 1017 along the positive Y direction.

[0027] In the reactor assembly 40, the water tank 44 is a cuboid with a front end 44a and a tail end 44b. The front end 44a and the tail end 44b are respectively located adjacent to the front side 10c and the rear side 10d. The first-stage reactor 42 includes two reactors 42a and 42b, which are respectively located on the front end 44a. The second-stage reactor 43 is located on the tail end 44b.

[0028] The reactor assembly 40 is laterally inserted into the third space 1103 through the second right-side opening 1014 (operation O3). The reactor assembly 40 is located above the pump assembly 20 and can be fixed or installed on the fifth crossbar 101d-5. Figures 6C to 6E show that the reactor assembly 40 is partially and sequentially assembled in the third space 1103. In Figure 6C, the water tank 44 is first laterally inserted into the third space 1103 through the second right-side opening 1014 along the negative X direction and placed or fixed on the fifth crossbar 101d-5. The first-stage reactor 42 and the second-stage reactor 43 are then laterally inserted into the third space 1103 through the second right-side opening 1014 along the negative X direction and installed on the water tank 44, as shown in Figures 6D and 6E. Subsequently, the exhaust gas guiding device 41 is installed on the first-stage reactor 42 from the second right-side opening 1014 or above along the negative X direction, as shown in Figure 6F. However, in other examples, the reactor assembly 40 may be assembled first and then placed into the third space 1103 through the second right-side opening 1014 along the negative X direction.

[0029] The electronic and control component 50 is laterally inserted into a front area of ​​the fourth space 1104 (operation O4) through the second left-side opening 1016. The electronic and control component 50 has a cabinet 51, a front panel of which is integrated into the left-side portion 1024b of the front end cover 1024. A side panel 510 of the cabinet 51 is mounted on the middle outer frame 101c-1 adjacent to the front area of ​​the fourth space 1104. In some examples, the electronic and control component 50 can be mounted or fixed to the frame 101 and / or the housing 102 through the cabinet 51, for example, through its side structure or other orientational structures. The electronic and control component 50 can be inserted into the front area of ​​the fourth space 1104 via the second left-side opening 1016 along the negative X direction, the second front opening 1011 along the negative Y direction, or the second rear opening 1018 along the positive Y direction.

[0030] The gas supply system 60 is laterally inserted into the top space 1105 through the second left-side opening 1016 (operation O5). The gas supply system 60 may be a gas panel, including a mounting base 61 and a gas distribution manifold assembly 62. The gas distribution manifold assembly 62 is disposed on the mounting base 61 and may include a gas distribution manifold, a flow controller, and a monitoring system. The mounting base 61 of the gas supply system 60 is mounted on the intermediate outer frame 101c-1 adjacent to the top space 1105. In some examples, the gas supply system 60 may be mounted or fixed to the frame 101 and / or the housing 102 through the mounting base 61, for example, its side structure or other orientation structures. The gas supply system 60 may be inserted into the rear region of the fourth space 1104 through the second left-side opening 1016 along the negative X direction or through the second rear opening 1018 and the third rear opening 1019 along the positive Y direction.

[0031] The first fluid delivery assembly 70 is disposed in a rear region of the fourth space 1104, and the second fluid delivery assembly 80 is disposed in a space between the reactor assembly 40 and the right side cover plate 1021 in the third space 1103.

[0032] The first fluid delivery assembly 70 includes a mounting base plate 71, a plurality of pipes 72, 73, and 74 disposed on the mounting base plate 71, and one or more valves disposed on the pipes 72, 73, and 74. The pipes 72, 73, and 74 are respectively configured to deliver cooling water into the gaseous pollutant treatment equipment to the reactor assembly 40, discharge the cooling water of the reactor assembly 40 to the gaseous pollutant treatment equipment, and drain water from the water tank 44. The second fluid delivery assembly 80 includes a first part 81 and a second part 82, which are respectively used to provide fresh water to the first-stage reactor 42 and / or the second-stage reactor 43 and to provide circulating water to the water tank 44.

[0033] The installation of the first fluid delivery assembly 70 and the second fluid delivery assembly 80 can be in various ways. In one example, the first fluid delivery assembly 70 can enter the space 110 laterally from the second left side opening 1016 or from the second rear side opening 1018, and the mounting base 71 is mounted on the middle outer frame 101c-1 adjacent to the rear region of the fourth space 1104; or, the first fluid delivery assembly 70 can be fixed or set in the rear region of the fourth space 1104 by connecting to the reactor assembly 40 and the water tank 44 via the pipes 72, 73, and 74.

[0034] The second fluid delivery assembly 80 can enter the space 110 (the third space 1103) laterally from the second right side opening 1014 or the second rear side opening 1018. The first part 81 can be installed on the rear end cover 1025, and the second part 82 can be installed on the right side cover 1021. It is understood that the first part 81 and the second part 82 can be first installed on the rear end cover 1025 and the right side cover 1021, and then the rear end cover 1025 and the right side cover 1021 can be installed on the frame 101, thereby fixing or setting the first fluid delivery assembly 70 in the rear area of ​​the fourth space 1104. Alternatively, it can be... First, place it in the rear area of ​​the fourth space 1104. When the rear end cover 1025 and the right side cover 1021 are installed on the frame 101, then install the first part 81 and the second part 82 on the rear end cover 1025 and the right side cover 1021; or, the second fluid delivery assembly 80 can be connected to the first stage reactor 42 and / or the second stage reactor 43 via the first part 81, and the second part 82 can be connected to the water tank 44 and fixed or set in the rear area of ​​the fourth space 1104, then install the first part 81 and the second part 82 on the rear end cover 1025 and the right side cover 1021.

[0035] In one example, the installation of the pump assembly 20, the microwave source 30, the reactor assembly 40, the electronic and control assembly 50, and the gas supply system 60 is performed in the order of operation O1, operation O2, operation O3, operation O4, and operation O5. In other examples, they may be performed in other orders, such as operation O1, operation O3, operation O2, operation O4, and operation O5, or operation O2, operation O4, operation O1, operation O3, and operation O5. In some examples, certain operations may be performed simultaneously, for example, operation O1 and operation O2 may be performed simultaneously first, followed by operation O3 and operation O4, and then operation O5, or operation O1, operation O3, operation O2, operation O4, and operation O5 may be performed simultaneously.

[0036] After the pump assembly 20, the microwave source 30, the reactor assembly 40, the electronic and control assembly 50, and the gas supply system 60 are installed into the space 110 of the housing 10, the first fluid delivery assembly 70 and the second fluid delivery assembly 80 can be installed before the cover plate is installed onto the frame 101; alternatively, the first fluid delivery assembly 70 and the second fluid delivery assembly 80 can be installed together with the cover plate; and since the cover plate is detachably installed onto the frame 101, it is also possible to install all or part of the cover plate first, and then install the first fluid delivery assembly 70 and the second fluid delivery assembly 80. Because the first fluid delivery assembly 70 and the second fluid delivery assembly 80 occupy less space, the installation is more flexible.

[0037] In this example, the openings on the rear side 10d, the left side 10e, and the right side 10f of the frame 101 serve as installation openings, including the first right side opening 1013, the second right side opening 1014, the first left side opening 1015, the second left side opening 1016, the first rear side opening 1017, the second rear side opening 1018, and the third rear side opening 1019. The opening on the front side 10c of the frame 101 may also serve as an installation opening and, after assembly, as a maintenance opening, including the first front side opening 1010, the second front side opening 1011, and the third front side opening 1012.

[0038] After the pump assembly 20, the microwave source 30, the reactor assembly 40, the electronic and control assembly 50, the gas supply system 60, the first fluid delivery assembly 70, and the second fluid delivery assembly 80 are installed in the space 110 of the housing 10, the right cover plate 1021, the left cover plate 1022, the top cover plate 1023, and the rear cover plate 1025 can be fixed to the frame 101. The fixing here refers to the detachable fixing, such as using threaded connectors (such as screws, bolts, screws), plug connectors (such as pins, tenons), fasteners (such as latches, buckles), quick-release parts, or interlocking parts, etc.; the fixing between the front cover plate 1024 and the frame 101 is an openable fixing. This is because when the gaseous pollutant treatment equipment is assembled and operating in the customer's factory, it is less necessary to open the right cover 1021, the left cover 1022, the top cover 1023, and the rear cover 1025, but more frequently the front cover 1024 needs to be opened. In one example, the right portion 1024a and the left portion 1024b of the front cover 1024 are respectively a left door and a right door. The hinges of the left door and the right door are respectively located at the left and right ends of the frame 101. The left portion 1024b includes an upper left door 1024b-1, a middle left door 1024b-2, and a lower left door 1024b-3. When the upper left door 1024b-1 is opened, the gas is exposed. The gas supply system 60, with its middle left door panel 1024b-2 opening to expose the electronic and control component 50, and its lower left door panel 1024b-3 opening to expose the microwave source 30, facilitates electrical maintenance by allowing maintenance personnel to perform electrical repairs via the first front opening 1010, the second front opening 1011, and the third front opening 1012. In one example, the left portion 1024b opens to expose a first maintenance opening, and the right portion 1024a opens to expose a second maintenance opening. The area of ​​either the first or second maintenance opening is not greater than the area of ​​any opening exposed after the left cover plate 1022 or the right cover plate 1021 is opened or removed.

[0039] In this example, the space for installing the pump assembly 20 can be referred to as a first region, the space for installing the reactor assembly 40 can be referred to as a second region, and the space for installing the electronic and control assembly 50 can be referred to as a third region. The first region, the second region, and the third region are respectively the first bottom space 1101, the third space 1103, and the fourth space 1104. In terms of relative position, the first region can be referred to as a bottom space, and the second region and the third region can be referred to as a first upper space and a second upper space, respectively. The portions for the pump assembly 20, the reactor assembly 40, and the electronic and control assembly 50 to enter and install in the space are a first installation opening, a second installation opening, and a third installation opening. The first installation opening, the second installation opening, and the third installation opening can be respectively the first right side opening 1013, the second right side opening 1014, and the second left side opening 1016.

[0040] Returning to Figure 6A, considering the process of installing the pump assembly 20, the microwave source 30, the reactor assembly 40, the electronic and control assembly 50, and the gas supply system 60 into the space 110 of the housing 10, each of the pump assembly 20, the microwave source 30, the reactor assembly 40, the electronic and control assembly 50, and the gas supply system 60 is individually defined with an installation orientation and each has a cross-sectional area in a lateral orientation. In this example, the cross-sectional area can be the area projected onto a plane orthogonal to the X-axis, such as A20-X, A30-X, A40-X, A50-X, and A60-X, or it can be the area projected onto a plane orthogonal to the Y-axis, such as A20-Y, A30-Y, A40-Y, A50-Y, and A60-Y. In this example, there are two microwave sources 30. The areas A30-X and A30-Y refer to the area of ​​either the first microwave source 31 or the second microwave source 32.

[0041] In one example, the area A20-X is not greater than the area of ​​the first right opening 1013, the area A30-X is not greater than the area of ​​the first left opening 1015, the area A40-X is not greater than the area of ​​the second right opening 1014, the area A50-X is not greater than the area of ​​the second left opening 1016, and the area A60-X is not greater than the area of ​​the second left opening 1016.

[0042] The area A20-Y is not greater than the area of ​​a right portion of the first front opening 1010, the area A30-Y is not greater than the area of ​​a left portion of the first front opening 1010, the area A40-Y is not greater than the area of ​​a right portion of the second front opening 1011, the area A50-Y is not greater than the area of ​​a left portion of the second front opening 1011, and the area A60-Y is not greater than the area of ​​the third front opening 1012.

[0043] This allows the pump assembly 20, microwave source 30, reactor assembly 40, electronic and control assembly 50, and gas supply system 60 to each function as a modular unit. These units can be pre-assembled into a single unit before being installed into the space 110 of the frame 101, and then the entire unit can be directly moved into the space 110 through the openings for assembly. This not only saves time but also reduces the chance of assembly errors. Conventional equipment for treating gaseous pollutants, such as combustion and water-washing exhaust gas treatment equipment, requires at least two assembly personnel and at least five working days to complete the assembly of one unit. However, in the above embodiment, only two assembly personnel and one working day are needed to complete the assembly of one unit.

[0044] Each module has a maximum dimension before assembly. Since the module is not usually a complete cube, it may have multiple lengths, widths and heights. Considering that it is placed into the space 110 through these openings, the maximum dimension is defined on the module, which refers to the maximum length, maximum width and maximum height of the module measured in the space. The pump assembly 20 has a first maximum dimension, which includes a first length L20, a first width W20, and a first height H20. The microwave source 30 has a second maximum dimension, which includes a second length L30, a second width W30, and a second height H30. The reactor assembly 40 has a third maximum dimension, which includes a third length L40, a third width W40, and a third height H40. The electronics and control assembly 50 has a fourth maximum dimension, which includes a fourth length L50, a fourth width W50, and a fourth height H50. The gas supply system 60 has a fifth maximum dimension, which includes a fifth length L60, a fifth width W60, and a fifth height H60.

[0045] The first length L20 and the first height H20 of the pump assembly 20 are not greater than the first right-side opening 1013; the second length L30 and the second height H30 of the microwave source 30 are not greater than the first left-side opening 1015; the third length L40 and the third height H40 of the reactor assembly 40 are not greater than the second right-side opening 1014; the fourth length L50 and the fourth height H50 of the electronics and control assembly 50 are not greater than the second left-side opening 1016; and the fifth length L60 and the fifth height H60 of the gas supply system 60 are not greater than the second left-side opening 1016. In one example, the sum of the fourth height H50 of the electronics and control assembly 50 and the fifth height H60 of the gas supply system 60 is not greater than the second left-side opening 1016.

[0046] Figures 7 through 9B show another example of a device for treating gaseous pollutants. This example shows another configuration of the frame 101, which includes multiple connectors, which may be rods, and these connectors are assembled to form a bottom structure 101a, a top structure 101b, an intermediate structure 101c, a first straight rod 101e-1, a second straight rod 101e-2, a first crossbar 101g-1, a second crossbar 101g-2, a third crossbar 101g-3, and a first partition. The enclosure 10 includes a first half 110a and a second half 110b. It should be understood that the term "half" does not mean that the first half 110a or the second half 110b is each half of the space 110, but is only used to refer to it as a part of the space 110. The connector divides the space 110 into multiple areas. The right side cover 1021 includes a first right side cover 1021a and a second right side cover 1021b. The first half 110a is used to house the reactor assembly 40, and the second half 110b is used to house the pump assembly 20, the microwave source 30, the electronic and control assembly 50, and the gas supply system (not shown). The second half 110b includes a bottom region 110b-1, a first intermediate region 110b-2, a second intermediate region 110b-3, and a top region 110b-4. The openings defined by the frame 101 include a first front opening 1030, a second front opening 1031, a third front opening 1032, a fourth front opening 1033, a first right opening 1034, a second right opening 1035, a first left opening 1036, a second left opening 1037, a first rear opening 1038, a second rear opening 1039, a third rear opening 1040, and a fourth rear opening 1041.

[0047] The pump assembly 20 can be inserted laterally into the bottom region 110b-1 of the second half 110b along the positive X direction from the first left side opening 1036, or it can be inserted into the bottom region 110b-1 of the second half 110b through the second front opening 1031 or the second rear opening 1039.

[0048] The microwave source 30 includes a first microwave source 31 and a second microwave source 32, which are stacked on top of each other. The microwave source 30 can be inserted laterally into the first intermediate region 110b-2 of the second half 110b along the positive X direction from the second left side opening 1037, or it can be inserted into the first intermediate region 110b-2 of the second half 110b through the third front opening 1032 or the third rear opening 1040.

[0049] The reactor assembly 40 includes an exhaust gas guiding device 41, a first-stage reactor 42, a second-stage reactor 43, and a water tank 44. The first-stage reactor 42 consists of two reactors 42a and 42b. In this example, the first-stage reactor 42, the second-stage reactor 43, and the water tank 44 can be assembled together and then laterally inserted into the first half 110a from the first right-side opening 1034 along the negative X direction. Alternatively, the water tank 44 can be laterally inserted into the first half 110a from the first right-side opening 1034 along the negative X direction, and then the first-stage reactor 42 and the second-stage reactor 43 can be installed on the water tank 44. Afterward, the exhaust gas guiding device 41 is installed on the first-stage reactor 42.

[0050] The electronic and control component 50 can be inserted laterally into the second middle region 110b-3 of the second half 110b along the positive X direction from the second left side opening 1037, or it can be inserted into the second middle region 110b-3 of the second half 110b through the fourth front opening 1033 or the fourth rear opening 1041.

[0051] The gas supply system 60 can be inserted laterally into the top region 110b-4 of the second half 110b along the positive X direction from the second left opening 1037, or it can be inserted from other directions.

[0052] In summary, by treating the pump assembly, reactor assembly, electronic and control assembly, microwave source, and gas supply system as individual modular units, the present invention allows each component to be pre-assembled into a single unit before being assembled into the space of the frame. These components are then assembled into the spaces through the openings of the frame, which significantly improves assembly efficiency and solves the problem that conventional equipment for treating gaseous pollutants requires a large amount of manpower and assembly time.

[0053] 10: Box 10a: Top surface 10b: Bottom surface 10c: Front side 10d: Rear side 10e: Left side 10f: Right side 101: Frame 101a: Bottom Structure 101a-1: Bottom outer frame 101a-2: Bottom crossbar 101b: Top Structure 101b-1: Top Outer Frame 101c: Intermediate structure 101c-1: Middle outer frame 101d-1: First horizontal bar 101d-2: Second horizontal bar 101d-3: Third horizontal bar 101d-4: Fourth horizontal bar 101d-5: Fifth horizontal bar 101d-6: Sixth horizontal bar 101e-1: First straight rod 101e-2: Second Straight Rod 101g-1: First crossbar 101g-2: Second crossbar 101g-3: Third crossbar 101f-1: First partition 101f-2: Second partition 1010: First front opening 1011: Second front opening 1012: Third front opening 1013: First right-side opening 1014: Second right-side opening 1015: First left-side opening 1016: Second left-side opening 1017: First rear opening 1018: Second rear opening 1019: Third rear opening 102: Shell 1021: Right side cover plate 1021a: First right side cover plate 1021b: Second right side cover plate 1022: Left side cover plate 1023: Top cover plate 1023a: Exhaust gas inlet section 1023b: Exhaust Gas Outlet Section 1023c: Gas Inlet Section 1024: Front cover plate 1024a: Right side portion 1024b: Left side 1024b-1: Upper left door panel 1024b-2: Middle left door panel 1024b-3: Lower left door panel 1025: Rear end cover 1026: Bottom cover plate 1030: First front opening 1031: Second anterior opening 1032: Third anterior opening 1033: Fourth anterior opening 1034: First right-side opening 1035: Second right-side opening 1036: First left-side opening 1037: Second left-side opening 1038: First rear opening 1039: Second rear opening 1040: Third rear opening 1041: Fourth rear opening 110: Space 110a: First Half 110b: Part Two 110b-1: Bottom area 110b-2: First intermediate region 110b-3: Second intermediate region 110b-4: Top area 1101: First bottom space 1102: Second bottom space 1103: The Third Space 1104: The Fourth Space 1105: Top Space 20: Pump Components 30: Microwave source 31: First Microwave Source 32: Second microwave source 40: Reactor Components 41: Exhaust gas guiding device 42: First-stage reactor 42a, 42b: Reactors 43: Second-stage reactor 44: Water tank 44a: Front end 44b: Tail end 50: Electronic and Control Components 51: Server rack 510: Side panel 60: Gas supply system 61: Mounting the substrate 62: Gas distribution manifold assembly 70: First fluid delivery assembly 71: Mounting the substrate 72, 73, 74: Piping 80: Second fluid delivery assembly 81: Part One 82: Part Two L1: First Length L2: Second Length L3: Third Length L20: First Length W20: First width H20: First Altitude L30: Second Length W30: Second Width H30: Second Height L40: Third Length W40: Third Width H40: Third Altitude L50: Fourth Length W50: Fourth Width H50: Fourth Height L60: Fifth Length W60: Fifth Width H60: Fifth Height

Claims

1. A modular device for treating gaseous pollutants, comprising: A frame includes multiple interconnected connectors and multiple spaces defined by the connectors, the spaces including a first region, a second region adjacent to the first region, and a third region adjacent to the first region, each region having an installation opening communicating with the outside; a pump assembly disposed in the first region; a reactor assembly including an exhaust gas guiding device, a first-stage reactor, a second-stage reactor, and a water tank, the exhaust gas guiding device being detachably connected to the first-stage reactor to guide exhaust gas into the first-stage reactor, the water tank being connected downstream of the first-stage reactor, and the second-stage reactor being connected to the water tank to receive the exhaust gas passing through the water tank, wherein the reactor assembly is detachably connected to the pump assembly and disposed in the second region; an electronic control assembly detachably connected to the reactor assembly and disposed in the third region; A fluid delivery assembly detachably connected to the reactor assembly includes multiple pipelines configured to supply cooling water to the reactor assembly, discharge cooling water from the reactor assembly, supply fresh water to the first-stage reactor and / or the second-stage reactor, and supply circulating water to the water tank; and a housing disposed on the frame to seal the spaces, the housing including multiple cover plates detachably attached to the connector to expose or seal the mounting opening, wherein the cover plate includes an exhaust gas inlet, an exhaust gas outlet, and a gas inlet, the exhaust gas inlet being connected to the exhaust gas guide device, the exhaust gas outlet being connected to a downstream of the second-stage reactor, and the gas inlet being connected to the fluid delivery assembly; The frame extends along a first transverse direction, a second transverse direction, and a longitudinal direction to define the boundary of the device with the housing; and the device is configured to allow the pump assembly, the reactor assembly, and the electronics and control assembly to be installed laterally through the mounting opening into the first region, the second region, and the third region, respectively, when the cover is removed from the mounting opening.

2. The device as requested in item 1, wherein the second region is laterally adjacent to the third region, and the first region is located below the second region.

3. The device of claim 2, wherein the second region is longitudinally separated from the first region by a spacer, and the spacer supports the tank of the reactor assembly.

4. The device as requested in item 2, wherein the first region is a bottom space, and the second region and the third region are a first upper space and a second upper space, respectively.

5. The device as claimed in claim 3, wherein the cover plate includes a right side cover plate, a left side cover plate, a top cover plate, a front end cover plate, and a rear end cover plate, the right side cover plate being adjacent to the reactor assembly located in the second region and the pump assembly located in the first region, and the left side cover plate being adjacent to the electronics and control assembly located in the third region, wherein... After the right cover plate detaches from the frame, it exposes a first mounting opening below the spacer and a second mounting opening above the spacer, allowing the pump assembly and the reactor assembly to enter the space and be installed through the first mounting opening and the second mounting opening, respectively. After the left cover plate detaches from the frame, it exposes a third mounting opening, allowing the electronic and control assembly to enter the space and be installed through the third mounting opening.

6. The device of claim 5, wherein the front cover includes a right-side portion and a left-side portion, the right-side portion being adjacent to the reactor assembly located in the second region and the pump assembly located in the first region, and the left-side portion being adjacent to the electronics and control assembly located in the third region, wherein, After the right side portion and the left side portion detach from the frame, a first maintenance opening and a second maintenance opening are respectively exposed. The area of ​​either the first maintenance opening or the second maintenance opening is not greater than the area of ​​either the second mounting opening or the third mounting opening.

7. The device of claim 5, wherein the pump assembly has a first maximum dimension, the first maximum dimension including a first length, a first width, and a first height; the reactor assembly has a second maximum dimension, the second maximum dimension including a second length, a second width, and a second height; and the electronics and control assembly has a third maximum dimension, the maximum dimension including a third length, a third width, and a third height, wherein, The first length and the first height of the pump assembly are not greater than the first mounting opening, the second length and the second height of the reactor assembly are not greater than the second mounting opening, and the third length and the third height of the electronic and control assembly are not greater than the third mounting opening.

8. The apparatus of claim 1, wherein the first-stage reactor and the second-stage reactor independently comprise one or more interconnected reaction modules, the reaction module being a combustion reactor, a wet reactor, a plasma combustion reactor, a plasma gasification reactor, and / or a thermal reactor.

9. The device of claim 1, wherein the reactor assembly, the electronics and control assembly and the pump assembly are each configured as a modular unit, the modular unit having a cross-sectional area in a lateral orientation not greater than the mounting opening for access to the first region, the second region and the third region from the mounting opening.

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