Gas separation device, gas recovery equipment, gas separation method and gas recovery method

Abstract

The gas separation apparatus of the present invention comprises: a plurality of separators having separation membranes having a high permeability of a specific component gas in a target gas; a target gas line that introduces the target gas into the plurality of separators; a permeable gas line that allows permeable gas in the target gas that has passed through the separation membrane to flow through; a non-permeable gas line that allows non-permeable gas in the target gas that has not passed through the separation membrane to flow through; a permeable gas return line that branches off from the permeable gas main line and connects to the target gas main line; a return flow regulator that regulates the flow rate of the permeable gas flowing through the permeable gas return line; an outflow-side concentration controller that controls the concentration of the specific component gas in the permeable gas; and a control device that controls the actuation amount of the return flow regulator based on the concentration of the specific component gas controlled by the outflow-side concentration controller.

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