Mask module and laser processing apparatus comprising the same
TW202637307APending Publication Date: 2026-09-16TECHNICS
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Patent Information
- Application Number
- TW115108265
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2026-03-05
- Filing Date
- 2026-03-06
- Publication Date
- 2026-09-16
Smart Images
Figure TWG2TA001077320_001 
Figure TWG2TA001077320_002 
Figure TWG2TA001077320_003
Abstract
A mask module and a laser processing apparatus including the same according to one embodiment may include: a first lens barrel; a second lens barrel; a third lens barrel disposed between the first lens barrel and the second lens barrel and connected in a manner detachable from the first lens barrel and the second lens barrel; a first window component disposed between the first lens barrel and the third lens barrel; a second window component disposed between the second lens barrel and the third lens barrel; and a mask supported by the third lens barrel.
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