Surface grinding device

Abstract

The present invention aims to provide a planar grinding device that is not easily scattered when supplying a supply liquid. The planar grinding device has an upper fixed plate (4), a lower fixed plate (2) and a supply liquid supply mechanism (5). The upper fixed plate (4) rotates, and the lower fixed plate (2) is opposite to the upper fixed plate (4). The supply liquid supply mechanism (5) supplies the supply liquid between the upper fixed plate (4) and the lower fixed plate (2). The supply liquid supply mechanism is provided with a groove-shaped part (groove (57)) and a cover member (60). The groove-shaped part (groove) has a concave cross-sectional shape and an upper opening (57a) for supplying the supply liquid from above. The groove-shaped part is formed as an annular shape and a supply liquid outlet hole (57b) is provided at the bottom. The cover member is disposed at least above the supply liquid outlet hole at the bottom of the groove.

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