Substrate carrying structure with elastic sheet

Abstract

A substrate carrying structure with a plurality of elastic sheets is provided to accommodate in a container and includes a pair of side carrying brackets and a pair or a plurality of pairs of fixing members. The side carrying brackets are respectively arranged on left and right sides of the container and include a plurality of shelves stacked up and down. Each of the shelves extends one or a pair of hollow sleeves having a top edge, a bottom edge, a notch defined on one of the top edge and the bottom edge, and the elastic sheet located in the notch and protruded from the hollow sleeves. The fixing members pass through and clamp the hollow sleeves to make them to stack tightly. The elastic sheets tightly abut against the other one of the top edge and the bottom edge. The substrate carrying structure is therefore achieving accurate assembly dimensions.

Description

Technical Field

[0001] This invention relates to a substrate support frame, and more particularly to a substrate support structure having a spring clip. Prior Technology

[0002] For example, substrates such as wafers, glass, and PCBs are important substrates in semiconductor manufacturing processes. Therefore, containers with substrate carriers are often used as the main tools for transporting substrates. The substrate carrier is used to position multiple substrates to avoid displacement or collision, and the container is used to protect multiple substrates from contamination or damage during transportation.

[0003] In addition, substrate carriers are often composed of multiple stacked shelves. The total height of the substrate carrier can be adjusted by increasing or decreasing the number of shelves, so that the substrate carrier can be matched with containers of various heights, thereby improving the ease of use of the substrate carrier.

[0004] However, each shelf has a height tolerance, which amplifies the height tolerance after several shelves are stacked and assembled. This causes the substrate carrier to be installed in the container by locking or other means, but it may still not be tight enough with the container size. In some cases, the substrate may even move around in the container, causing the substrate carrier to lose its function of positioning the substrate.

[0005] Furthermore, since the side panels of conventional shelves extend from the top and bottom surfaces of the base plate, when multiple shelves are stacked on top of each other, the joints of the multiple side panels will be formed in the middle of the two adjacent base plates. Moreover, the two adjacent joints at each joint will have obvious height differences due to different tolerances. When the substrate is placed on each shelf, it is easy to insert the substrate into the joint or to impact the height difference of the joint, which will cause the edge of the substrate to collide with the shelf and be damaged or broken.

[0006] In view of this, the inventor has devoted himself to researching and applying theoretical principles to address the aforementioned problems in the prior art, which is the goal of the inventor's development. Summary of the Invention

[0007] This invention provides a substrate support structure with spring clips. Each hollow sleeve has a notch on one of its top and bottom edges and a spring clip extending from the notch and protruding from the hollow sleeve. When multiple hollow sleeves are stacked tightly together, each spring clip presses against the other of its top and bottom edges. By compressing the spring clips, assembly tolerances can be eliminated, thus achieving the advantage of precise assembly dimensions in the substrate support structure of this invention.

[0008] In an embodiment of the present invention, the present invention provides a substrate support structure with a spring clip, which is housed in a container. The substrate support structure includes: a pair of side support frames, respectively disposed on the left and right sides of the container, each side support frame including a plurality of stacked layers, each layer extending with at least one hollow sleeve, each hollow sleeve having a top edge and a bottom edge, a notch from one of the top edge and the bottom edge, and a spring clip extending from the notch and protruding from the hollow sleeve; and at least a pair of fixing members, each fixing member passing through and clamping the plurality of hollow sleeves so that the plurality of hollow sleeves are tightly stacked together, and each spring clip tightly abutting against the other of the top edge and the bottom edge.

[0009] In one embodiment of the invention, each of the spring pieces includes a transverse spring arm extending from the inner periphery of the notch and a protrusion extending from the transverse spring arm and protruding from one of the top edge and the bottom edge, each of the protrusions pressing against the other of the top edge and the bottom edge.

[0010] In one embodiment of the present invention, each notch is opened from each of the bottom edges, each of the protrusions protrudes from each of the bottom edges by 0.1 to 0.3 mm, and the protrusion of each of the spring pieces tightly abuts against each of the top edges.

[0011] In one embodiment of the present invention, the bottom surface of each of the transverse elastic arms is on the same plane as the bottom edge, and the outer surface of each of the transverse elastic arms is on the same curved surface as the outer periphery of the hollow sleeve.

[0012] In one embodiment of the present invention, each notch is opened from each of the top edges, each of the protrusions protrudes from each of the top edges by 0.1 to 0.3 mm, and the protrusion of each of the spring pieces tightly abuts against each of the bottom edges.

[0013] In one embodiment of the present invention, the top surface of each of the transverse elastic arms is on the same plane as the top edge, and the outer surface of each of the transverse elastic arms is on the same curved surface as the outer periphery of the hollow sleeve.

[0014] In one embodiment of the present invention, each of the spring pieces includes a transverse spring arm extending from the inner periphery of the notch and an inclined surface protruding from the surface of the transverse spring arm away from the notch. Each inclined surface gradually protrudes from one of the top edge and the bottom edge toward the end of the transverse spring arm and tightly abuts against the other of the top edge and the bottom edge.

[0015] In one embodiment of the present invention, each notch is opened from each of the bottom edges, each of the inclined surfaces is connected to each of the bottom edges on one side and is located on the same plane, and gradually protrudes from each of the bottom edges by 0.1 to 0.3 mm on the other side, and each of the inclined surfaces tightly abuts against each of the top edges.

[0016] In one embodiment of the present invention, each notch is opened from each of the top edges, each of the inclined surfaces is connected to each of the top edges on one side and is located on the same plane, and gradually protrudes from each of the top edges by 0.1 to 0.3 mm on the other side, and each of the inclined surfaces tightly abuts against each of the bottom edges.

[0017] In one embodiment of the present invention, each shelf has two hollow sleeves, each of the two hollow sleeves extending from the front and rear ends of the outer side of each shelf, and two pairs of fasteners, each of the fasteners including a screw passing through the plurality of hollow sleeves and two bolts screwed to both ends of each screw.

[0018] In one embodiment of the present invention, each of the hollow sleeves at the rear end of the shelf has a hook extending along its axial direction, and the cross-section of each hook is L-shaped.

[0019] In one embodiment of the present invention, each shelf has a base plate, the top surface of each base plate extends a side plate and the bottom surface is provided with an abutment portion, the side plate of one stacked shelf abuts the abutment portion of another shelf, and a joint is formed at the junction of each side plate and each abutment portion, and each joint is disposed adjacent to each base plate.

[0020] In one embodiment of the present invention, each side plate extends upward from the top surface of each bottom plate, and each abutment portion is formed on the bottom surface of each bottom plate.

[0021] In one embodiment of the present invention, each side plate extends downward from the bottom surface of each base plate, and each abutment portion is formed on the top surface of each base plate.

[0022] In one embodiment of the present invention, one of the side plates and one of the abutting portions has a protruding strip and the other has a strip groove, and the protruding strip is fitted into the strip groove.

[0023] In one embodiment of the present invention, each of the protrusions extends from each of the side plates, and each of the strip grooves is formed from each of the abutment portions.

[0024] In one embodiment of the present invention, each of the protrusions extends from each of the abutment portions, and each of the strip grooves is formed from each of the side plates.

[0025] Based on the above, each layer of the frame has manufacturing tolerances, resulting in height tolerances for each hollow sleeve or unevenness of the stacked surfaces. This leads to an overall dimensional error when multiple hollow sleeves are stacked due to the aforementioned tolerances or unevenness, causing incompatibility with the container assembly. This results in the substrate support structure being too tall to fit inside the container, or too short, causing loosening and shaking inside the container. However, because each hollow sleeve has a protruding spring clip, and the two bolts can be tightened or loosened relative to the screw to adjust the clamping force of the multiple hollow sleeves, the amount of compression deformation of the spring clip can be adjusted. The height tolerances of each hollow sleeve or the unevenness of the stacked surfaces can be adjusted by the spring clip abutting against another hollow sleeve and the expansion and contraction of the relative notch. In other words, the total height of the stacked multiple hollow sleeves can be eliminated by the compression of the spring clip by the fixing member, thereby achieving the advantage of precise assembly dimensions of the substrate support structure of the present invention.

[0026] Based on the above, the joint seams of the substrate support structure of the present invention are concealed at the lower or upper edge of each base plate, so that when the substrate is placed or removed from the shelf, the substrate is less likely to fall into the joint seams with height differences or be interfered with by the joint seams with height differences. Moreover, the joint seams have interlocking convex and concave grooves, so that the side plates and the abutting parts fit more tightly at the joint seams and present a concealed and seamless state, thereby achieving the characteristics of concealing joint seams and preventing the substrate from falling into the joint seams in the substrate support structure of the present invention. Simple Explanation of the Diagram

[0027] Figure 1 is a perspective view of the substrate support structure of the present invention in use.

[0028] Figure 2 is a partial cross-sectional view of the substrate support structure of the present invention located on the front side of the container.

[0029] Figure 3 is a partial cross-sectional view of the substrate support structure of the present invention located on the rear side of the container.

[0030] Figure 4 is a cross-sectional view of the substrate support structure of the present invention in use.

[0031] Figure 5 is an exploded perspective view of the side support frame of the present invention.

[0032] Figure 6 is an exploded perspective view of the stacked shelves of the present invention.

[0033] Figure 7 is an enlarged schematic diagram of one of the dashed circle selections in Figure 6 of the present invention.

[0034] Figure 8 is an enlarged schematic diagram of another dashed circle selection in Figure 6 of the present invention.

[0035] Figure 9 is a partial cross-sectional view of the shelf of the present invention.

[0036] Figure 10 is an enlarged schematic diagram of the area selected by the dashed circle in Figure 9 of this invention.

[0037] Figure 11 is a partial exploded cross-sectional view of the stacked shelves of the present invention.

[0038] Figure 12 is another partial exploded cross-sectional view of the stacked shelves of the present invention.

[0039] Figure 13 is a three-dimensional assembly diagram of the side support frame of the present invention.

[0040] Figure 14 is a partial cross-sectional view of the side support frame of the present invention.

[0041] Figure 15 is an enlarged schematic diagram of the area selected by the dashed circle in Figure 14 of this invention.

[0042] Figure 16 is another partial cross-sectional view of the side support frame of the present invention.

[0043] Figure 17 is an enlarged schematic diagram of another embodiment of the spring clip of the present invention.

[0044] Figure 18 is a schematic diagram of the usage state of another embodiment of the spring clip of the present invention. Implementation

[0045] In the description of this invention, it should be understood that the terms "front side," "rear side," "left side," "right side," "front end," "rear end," "end," "longitudinal," "lateral," "vertical," "top," "bottom," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting conditions of this invention.

[0046] The detailed description and technical content of this invention will be explained below with reference to the accompanying drawings. However, the accompanying drawings are for illustrative purposes only and are not intended to limit the invention.

[0047] Please refer to Figures 1 to 16. The present invention provides a substrate support structure with spring clips, which is housed in a container 100 and used to support a substrate 200 such as a wafer. The container 100 is a box with an opening 101 on the front side, but the opening 101 can be opened at any position in the container 100, and is not limited to this embodiment. This substrate support structure 10 mainly includes a pair of side support frames 1 and one or more pairs of fixing members 2.

[0048] As shown in Figures 1 to 16, the aforementioned opposite support frames 1 are fixed and arranged on the left and right sides of the container 100, respectively. Each support frame 1 includes multiple stacked layers 11. Each layer 11 extends one or more hollow sleeves 12. Each hollow sleeve 12 has a top edge 121 and a bottom edge 122, a notch 123 is provided from the top edge 121 or the bottom edge 122, and a spring piece 124 extends from the notch 123 and protrudes from the hollow sleeve 12.

[0049] Each spring piece 124 includes a transverse spring arm 125 extending from the inner periphery of the notch 123 and a protrusion 126 protruding from the transverse spring arm 125 and extending out of one of the top edge 121 and the bottom edge 122. When the protrusion 126 is pressed, it can elastically expand and contract and retract into the notch 123.

[0050] The details are as follows: In this embodiment, each notch 123 is a hollow recess that extends upward from the bottom edge 122 and penetrates the inner and outer surfaces. The transverse elastic arm 125 extends from the left inner wall or the right inner wall of the hollow recess. The protrusion 126 protrudes from the bottom edge 122 by about 0.1 to 0.3 mm. In this embodiment, the protrusion 126 is a rectangular block, but it is not limited to this. The protrusion 126 can also be a triangular block, a trapezoidal block, or any other geometric shape. The bottom surface of each transverse elastic arm 125 is on the same plane as the bottom edge 122, and the outer surface of each transverse elastic arm 125 is on the same curved surface as the outer periphery of the hollow sleeve 12.

[0051] The optimal size of the protrusion 126 protruding from the bottom edge 122 is 0.2 mm, the optimal length of the transverse spring arm 125 is 4 to 5 mm, and the optimal thickness of the transverse spring arm 125 is 1 to 2 mm. However, the dimensions of the spring piece 124 are not limited to the aforementioned values.

[0052] Furthermore, each notch 123 can also be a through-hole that extends downward from each top edge 121 and penetrates the inner and outer surfaces. The transverse elastic arm 125 extends from the left inner wall or the right inner wall of the through-hole. The protrusion 126 protrudes from the top edge 121 by about 0.1 to 0.3 mm. The optimal size of the protrusion 126 protruding from the top edge 121 is 0.2 mm. The top surface of each transverse elastic arm 125 is on the same plane as the top edge 121, which is not limited to the above embodiment.

[0053] In addition, each shelf 11 has a base plate 111, and each base plate 111 has a side plate 112 extending from its top surface and an abutment portion 113 on its bottom surface. The side plate 112 of one shelf 11 that is stacked abuts against the abutment portion 113 of another shelf 11, and a joint seam S is formed at the junction of each side plate 112 and each abutment portion 113. Each joint seam S is arranged adjacent to each base plate 111.

[0054] Furthermore, one of the side plates 112 and each abutment portion 113 has a protruding ridge 114 and the other has a strip groove 115. Each ridge 114 fits into each strip groove 115, so that the joint S has ridges 114 and strip grooves 115 that are interlocked, making the side plates 112 and each abutment portion 113 fit together more tightly at the joint S, thus presenting a hidden and seamless state.

[0055] Each joint S is formed at the lower edge of each base plate 111. Since the substrate 200 will abut against the base plate 111 when placing each shelf 11, the joint S is formed at the lower edge of the base plate 111, which can further prevent the substrate 200 from being inserted into the joint S.

[0056] Furthermore, in this embodiment, each convex strip 114 protrudes from each side plate 112, and each strip groove 115 is formed from each abutment portion 113. However, this is not a limitation; each convex strip 114 may protrude from each abutment portion 113, and each strip groove 115 may be formed from each side plate 112.

[0057] Furthermore, in this embodiment, each shelf 11 has two hollow sleeves 12. Each pair of hollow sleeves 12 extends from the front and rear ends of each bottom plate 111 and each side plate 112, respectively. That is, each pair of hollow sleeves 12 extends from the front and rear ends of the outer side of each shelf 11. The rear end of each shelf 11 is further away from the opening 101 of the container 100 than the front end. Each hollow sleeve 12 at the rear end of each shelf 11 has a hook 13 extending along its axial direction. The cross-section of each hook 13 is L-shaped. The hook 13 is used to engage with the carrier body of the substrate 200 and also to stop the substrate 200, so that the substrate 200 is stably fixed in the shelf 11.

[0058] Furthermore, each shelf 11 is made of plastic injection molding, but this is not a limitation. Therefore, the base plate 111, side plate 112, hollow sleeve 12, spring piece 124 and protrusion 114 are also made of plastic injection molding as a whole and cannot be disassembled from each other.

[0059] As shown in Figures 1 to 5, 11 to 14, and 16, each fixing member 2 passes through and clamps the plurality of hollow sleeves 12, so that the plurality of hollow sleeves 12 are tightly stacked together, such that each protrusion 126 tightly abuts against the other of each top edge 121 and bottom edge 122, that is, each spring piece 124 tightly abuts against the other of each top edge 121 and bottom edge 122.

[0060] In this embodiment, because each protrusion 126 protrudes from the bottom edge 122, the protrusion 126 of each spring piece 124 tightly abuts against each top edge 121; conversely, each protrusion 126 protrudes from the top edge 121, so that the protrusion 126 of each spring piece 124 tightly abuts against each bottom edge 122.

[0061] Further explanation is as follows: In this embodiment, there are two pairs of fasteners 2. Each fastener 2 includes a screw 21 that passes through a plurality of hollow sleeves 12 and two bolts 22 that are screwed to both ends of each screw 21. The screw 21 has screw holes at both ends (not shown in the figure). The two bolts 22 are screwed to the screw holes at both ends of the screw 21 and are arranged at the upper and lower ends of the stacked plurality of hollow sleeves 12, so that the two bolts 22 together tightly clamp the plurality of hollow sleeves 12.

[0062] As shown in Figures 1 to 11 and Figures 13 to 15, the substrate support structure 10 of the present invention is used in a manner where each layer 11 has manufacturing tolerances, resulting in height tolerances for each hollow sleeve 12 or unevenness of the stacked surfaces. This causes an overall dimensional error when multiple hollow sleeves 12 are stacked due to the aforementioned tolerances or surface unevenness, leading to a misalignment with the container 100. This results in the substrate support structure 10 being too tall to fit within the container 100, or too short and becoming loose within the container 100. While the hollow sleeve 12 may shake, each hollow sleeve 12 has a protruding spring piece 124, and the two bolts 22 can be tightened or loosened relative to the screw 21 to adjust the force of clamping the plurality of hollow sleeves 12, thereby adjusting the amount of compression deformation of the spring piece 124. This allows the thickness tolerance of each hollow sleeve 12 or the unevenness of the stacked surfaces to be adjusted by the spring piece 124 abutting against another hollow sleeve 12 and the expansion and contraction of the corresponding notch 123. In other words, the deformation of the spring piece 124 is increased or decreased by the locking force of the two bolts 22 to tighten and adjust the height of the substrate bearing structure 10.

[0063] As shown in Figures 2 and 3, each bolt 22 in this embodiment includes a screw 221 and a clamping element 222. Each clamping element 222 has a through hole 223. The bottom plate of the container 100 has a plurality of through holes 102. The clamping element 222, positioned above the screw 21, is sandwiched between the container 100 and the screw 21. The screw 221, positioned above the screw 21, passes through the through hole 223, accommodates the clamping element 222, and is screwed into the upper screw hole of the screw 21. The clamping element 222, positioned below the screw 21... The screw 221, located outside the container 100 and passing through the through hole 102, and positioned below the screw 21, passes through the through hole 223, accommodates the clamping element 222, and is screwed into the lower screw hole of the screw 21. When the screw 221, positioned above and below the screw 21, locks the screw 21, it clamps the clamping element 222, thereby clamping the stacked plurality of hollow sleeves 12 and fixing the substrate support structure 10 in the container 100. However, this is not a limitation; the bolt 22 may be simply the screw 221, omitting the clamping element 222.

[0064] In this way, the total height of the stacked multiple hollow sleeves 12 can be eliminated by compressing the spring piece 124 through the fixing member 2 to eliminate assembly tolerance, so as to achieve the advantage of the substrate support structure 10 of the present invention having precise assembly dimensions.

[0065] In addition, since the side plates of conventional shelves extend from the top and bottom surfaces of the base plate, when multiple shelves are stacked on top of each other, the joints of the multiple side plates will be formed in the middle of the two adjacent base plates. Since each shelf 11 has manufacturing tolerances, the two adjacent joints at each joint will have obvious height differences due to the different tolerances. When the substrate is picked up or put down from the shelf, the substrate is easy to get stuck in the joint with the height difference or be interfered with by the joint with the height difference, which will cause the substrate picking and putting operation to fail, and may even cause damage or breakage to the substrate.

[0066] In contrast, as shown in Figures 1 to 9, 11 to 13, and 16, the joint seam S of the substrate support structure 10 of the present invention is concealed at the lower or upper edge of each base plate 111, so that when the substrate 200 is placed on or off the shelf 11, the substrate 200 is less likely to get stuck in the joint seam S with high and low step differences or be interfered with by the joint seam S with high and low step differences. Moreover, the joint seam S has interlocking convex strips 114 and strip grooves 115 inside.

[0067] This allows the side plate 112 and the abutting part 113 to fit more tightly at the joint seam S, creating a concealed and seamless state, so as to achieve the characteristics of the substrate support structure 10 of the present invention having a concealed joint seam S and preventing the substrate 200 from sinking into the joint seam S.

[0068] As shown in Figures 17 and 18, another embodiment of the spring piece 124 of the present invention is shown. The embodiments of Figures 17 and 18 are generally the same as the embodiments of Figures 6 to 11 and Figures 14 to 15. The difference between the embodiments of Figures 17 and 18 and the embodiments of Figures 6 to 11 and Figures 14 to 15 is that the structure of the spring piece 124 is different.

[0069] The details are as follows: Each spring piece 124 includes a transverse spring arm 125 extending from the inner periphery of the notch 123 and an inclined surface 127 protruding from the surface of the transverse spring arm 125 away from the notch 123. Each inclined surface 127 gradually protrudes from one of the top edge 121 and the bottom edge 122 towards the end of the transverse spring arm 125, and tightly abuts against the other of the top edge 121 and the bottom edge 122. In this way, the same function and effect as in Figures 1 to 16 are achieved.

[0070] In this embodiment, each notch 123 is opened from each bottom edge 122, and each inclined surface 127 is connected to each bottom edge 122 on one side and is located on the same plane, and gradually protrudes from each bottom edge 122 by about 0.1 to 0.3 mm on the other side, and each inclined surface 127 tightly abuts against each top edge 121.

[0071] In addition, the optimal size for the highest end of the inclined surface 127 to protrude from the bottom edge 122 is 0.2 mm, the optimal size for the length of the transverse spring arm 125 is 4 to 5 mm, and the optimal size for the thickness of the transverse spring arm 125 is 1 to 2 mm, but the dimensions of the spring piece 124 are not limited to the aforementioned values.

[0072] However, each notch 123 can also be opened from each top edge 121. Each inclined surface 127 is connected to each top edge 121 on one side and is located on the same plane, and gradually protrudes from each top edge 121 on the other side by about 0.1 to 0.3 mm. The optimal size of the highest end of the inclined surface 127 protruding from the top edge 121 is 0.2 mm. Each inclined surface 127 tightly abuts against each bottom edge 122. This is not limited to this embodiment.

[0073] In summary, the substrate support structure with spring element of the present invention has not been seen in similar products or publicly used before, and has industrial applicability, novelty and inventiveness, and fully meets the requirements for patent application. Therefore, this application is filed in accordance with the Patent Law to protect the rights of the inventor.

[0074] However, the above description is merely an embodiment of the present invention and should not be construed as limiting the scope of the present invention. Any simple equivalent changes and modifications made in accordance with the scope of the patent application and the contents of the patent specification of the present invention shall still fall within the scope of the patent of the present invention.

[0075] 100: Container 101: Opening 102: Through hole 200:Substrate 10: Substrate support structure 1: Side support frame 11: Shelves 111: Base Plate 112: Side panel 113:Butt part 114: convex strip 115: Strip ditch 12: Hollow sleeve 121: Top Edge 122: Bottom edge 123: Gap 124: Shrapnel 125: Lateral spring arm 126: bump 127: Inclined surface 13: Hook 2: Fasteners 21: Screw 22: Bolt 221: Screw 222: Pressing element 223: Perforation S: Joint seam

Claims

1. A substrate support structure with a spring clip, housed within a container, the substrate support structure comprising: A pair of side support frames are respectively disposed on the left and right sides of the container. Each side support frame includes multiple stacked layers. Each layer extends with at least one hollow sleeve. Each hollow sleeve has a top edge and a bottom edge, a notch from one of the top edge and the bottom edge, and a spring clip extending into the notch and protruding from the hollow sleeve. There is also at least one pair of fasteners, each fastener passing through and clamping the multiple hollow sleeves so that the multiple hollow sleeves are tightly stacked together, and each spring clip tightly abuts against the other of the top edge and the bottom edge.

2. The substrate support structure with spring members as described in claim 1, wherein each spring member includes a transverse spring arm extending from the inner periphery of the notch and a protrusion extending from the transverse spring arm and protruding from one of the top edge and the bottom edge, each protrusion pressing against the other of the top edge and the bottom edge.

3. The substrate support structure with spring members as described in claim 2, wherein each of the notches is opened from each of the bottom edges, each of the protrusions protrudes from each of the bottom edges by 0.1 to 0.3 mm, and the protrusion of each of the spring members tightly abuts against each of the top edges.

4. The substrate support structure with spring members as described in claim 3, wherein the bottom surface of each of the transverse spring arms is on the same plane as the bottom edge, and the outer surface of each of the transverse spring arms is on the same curved surface as the outer periphery of the hollow sleeve.

5. The substrate support structure with spring members as described in claim 2, wherein each of the notches is opened from each of the top edges, each of the protrusions protrudes from each of the top edges by 0.1 to 0.3 mm, and the protrusion of each of the spring members tightly abuts against each of the bottom edges.

6. The substrate support structure with spring members as described in claim 5, wherein the top surface of each of the transverse spring arms is on the same plane as the top edge, and the outer surface of each of the transverse spring arms is on the same curved surface as the outer periphery of the hollow sleeve.

7. The substrate support structure with spring members as described in claim 1, wherein each spring member includes a transverse spring arm extending from the inner periphery of the notch and an inclined surface protruding from the surface of the transverse spring arm away from the notch, each inclined surface gradually protruding towards one of the top edge and the bottom edge in a direction close to the end of the transverse spring arm, and pressing against the other of the top edge and the bottom edge.

8. The substrate support structure with spring clips as described in claim 7, wherein each of the notches is opened from each of the bottom edges, each of the inclined surfaces is connected to each of the bottom edges on one side and located in the same plane, and gradually protrudes from each of the bottom edges on the other side between 0.1 and 0.3 mm, and each of the inclined surfaces tightly abuts against each of the top edges.

9. The substrate support structure with spring-loaded member as described in claim 7, wherein each of the notches is opened from each of the top edges, each of the inclined surfaces is connected to each of the top edges on one side and located in the same plane, and gradually protrudes from each of the top edges on the other side between 0.1 and 0.3 mm, and each of the inclined surfaces tightly abuts against each of the bottom edges.

10. The substrate support structure with spring clips as described in claim 1, wherein each of the shelves has two hollow sleeves, each of the two hollow sleeves extending from the front and rear ends of the outer side of each shelf, and two pairs of fasteners, each of the fasteners comprising a screw passing through the plurality of hollow sleeves and two bolts screwed to both ends of each screw.

11. The substrate support structure with spring clips as described in claim 10, wherein each of the layer holders has a hook extending axially along the rear end of the hollow sleeve, and each hook has an L-shaped cross-section.

12. The substrate support structure with spring clips as described in claim 1, wherein each shelf has a base plate, each base plate has a side plate extending from its top surface and an abutment portion provided on its bottom surface, the side plate of one stacked shelf abuts against the abutment portion of another shelf, and a joint is formed at the junction of each side plate and each abutment portion, and each joint is disposed adjacent to each base plate.

13. The substrate support structure with spring members as described in claim 12, wherein each of the side plates extends upward from the top surface of each of the base plates, and each of the abutting portions is formed on the bottom surface of each of the base plates.

14. The substrate support structure with spring members as described in claim 12, wherein each of the side plates extends downward from the bottom surface of each of the base plates, and each of the abutting portions is formed on the top surface of each of the base plates.

15. The substrate support structure with spring sheet as described in claim 12, wherein one of the side plates and one of the abutting portions has a protruding strip and the other has a strip groove, and the protruding strip is fitted into the strip groove.

16. The substrate support structure with spring members as described in claim 15, wherein each of the protrusions extends from each of the side plates and each of the strip grooves is formed from each of the abutment portions.

17. The substrate support structure with spring members as described in claim 15, wherein each of the protrusions extends from each of the abutments and each of the grooves is formed from each of the side plates.

Images