Operating method of mechanism platform system

TW202637452APending Publication Date: 2026-09-16TSMC CHINA COMPANY +1
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Patent Information

Application Number
TW114120144
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-05
Filing Date
2025-05-28
Publication Date
2026-09-16

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Abstract

An operating method of mechanism platform system includes placing a wafer boat including one or more semiconductor wafers onto an automated mechanism platform apparatus mounted on a shelf of a first rack, wherein the automated mechanism platform apparatus includes a rotor and a turntable over the rotor; utilizing a position detection system to verify a placement of the wafer boat on the turntable; rotating the wafer boat on the turntable to adjust an orientation of the wafer boat.
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