Synthesis method for cerium oxide nanoparticles and chemical mechanical polishing slurry

Abstract

The invention provides a synthesis method for cerium oxide nanoparticles, comprising the following main steps: Step S1: prepare a cerium salt aqueous solution, add two types of polyvalent metal salt solutions, and mix uniformly. Step S2: configure a precipitant in a closed reaction vessel, then rapidly introduce the cerium source solution into the reaction vessel with vigorous stirring. Step S3: heat to the target temperature for crystallization. Step S4: purify and disperse the product to obtain cerium oxide nanoparticles. Compared to undoped or single-element-doped cerium oxide, the cerium oxide prepared by this method, which simultaneously incorporates two metal elements, exhibits richer oxygen vacancies and demonstrates excellent CMP (Chemical Mechanical Planarization) application properties.