Reaction tube and furnace tube equipment

Abstract

This disclosure discloses a reaction tube and furnace tube equipment, relating to the field of semiconductor manufacturing equipment. The reaction tube, used in a furnace tube equipment, includes an outer tube with a suction port at its lower end; and an inner tube disposed within the outer tube, including a vent extending vertically. The inner tube, along the vertical direction from top to bottom, includes: a first region where the width of the vent decreases from top to bottom; a second region where the width of the vent is the same and not greater than the width of the vent in the first region; and a third region where the width of the vent decreases from top to bottom and is not greater than the width of the vent in the second region.

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