Apparatus and method for cleaning susceptors with plasma
TW202637894APending Publication Date: 2026-09-16APPLIED MATERIALS INC
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Patent Information
- Application Number
- TW114138734
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-03-04
- Filing Date
- 2025-10-08
- Publication Date
- 2026-09-16
Smart Images
Figure TWG2TA001076303_001 
Figure TWG2TA001076303_002 
Figure TWG2TA001076303_003
Abstract
Embodiments described herein relate to an apparatus that includes a chamber, and a lid that is configured to seal the chamber. In an embodiment, the lid includes a dielectric faceplate, and a plurality of dielectric resonators coupled to the dielectric faceplate. In an embodiment, the plurality of dielectric resonators are arranged in a ring-like pattern. In an embodiment, a gas line passes through the lid, and the gas line is within an inner perimeter of the ring-like pattern.
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