Monitoring systems, methods, programs, memory media, and vacuum pumping devices

TW202637936APending Publication Date: 2026-09-16EBARA CORP
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Patent Information

Application Number
TW114141815
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-11-01
Filing Date
2025-10-29
Publication Date
2026-09-16

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Abstract

In a monitoring system for monitoring a vacuum pumping device, the vacuum pumping device includes: one or more vacuum pumps; and one or more sensors disposed near the intake port and / or exhaust port of the one or more vacuum pumps to measure the amount of powder contained in the gas attracted to the one or more vacuum pumps; the monitoring system includes: an acquisition unit for acquiring output values ​​from the one or more sensors; and a calculation unit for calculating an estimated amount of powder accumulated in the one or more vacuum pumps based on the output values.
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